应用于可穿戴式智能设备的MEMS电容型传感器信号调理集成电路研究

项目名称： 应用于可穿戴式智能设备的MEMS电容型传感器信号调理集成电路研究

项目编号： No.61504086

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 黎冰

作者单位： 深圳大学

项目金额： 24万元

中文摘要： “可穿戴式智能设备”的本质是通过各种MEMS传感器让一个个戴在身上的“小东西”实现运动跟踪、数据收集、信息传输和互动。因此设计低成本、低功耗、高性能、可兼容多种MEMS传感器的信息平台成为其核心技术。本项目将研究MEMS电容型传感器信号调理集成电路，使之具备如下关键特性而更好的应用于可穿戴式智能设备：（1）全兼容：支持pF~nF量级各类MEMS传感器在可穿戴式智能设备平台上的全兼容；（2）低功耗：在单次测量时间配置为1mS进行连续转换时，功耗低至10uW，提供更长待机时间；（3）高精度：在电路噪声、失调等非理性因素影响下实现aF量级电容变化值的精确检测，并达到13位的高线性度。本项目将在0.18um CMOS工艺上实现，预期的研究成果将在高兼容性、低功耗、高精度等方面远远胜过国际同类设计，同时电路的优值有望在当前国际最优水平上再提升一个数量级，至100fJ/step，继续保持国际领先水平。

中文关键词： Sigma-Delta调制器；开关电容；数字校正/校准；MEMS传感器；信号调理集成电路

英文摘要： “Wearable Smart Device” is applying the wearable technology on the daily wear to do the intelligent design and develop the wearable smart devices. Its essence is allowing a variety of MEMS sensors to realize the motion tracking, data collection, information transmission and interaction. So the design of an information collection platform, which should be low cost, low power, high performance, and fully compatible with a variety of MEMS sensors, becomes the core technology of “Wearable Smart Device”. This research project will investigate the design of a low power, high precision and fully compatible signal conditioning integrated circuit for MEMS capacitance sensor, which has the following key characteristics to be well applied in the “Wearable Smart Device”: (1) Fully Compatible: supporting all kinds of MEMS capacitance sensors, which has a pF~nF order of magnitude, in the “Wearable Smart Device” platform, including most of measurement configurations on the ‘Unipolar’ and ‘Push-Pull’ type; (2) Low Power: power can reach 10uW with 1mS measurement time configuration, to provide more stand-by time; (3) High Resolution: realizing the accurate detection of aF order of magnitude changes in capacitance and 13 bit linearity under many non-idealities, such as circuit noise, offset, charge injection, and so on. This project will be implemented in 0.18um CMOS technology, the expected results will be so far exceed than the international similar designs in the high compatibility, low power consumption, high precision (linearity) performance, also the circuit Figure-of-Merit (FoM) is expected to improve by an order of magnitude to 100fJ/step, continue to maintain the international advanced level.

英文关键词： Sigma-Delta Modulator;Switched Capacitor;Digital Calibration;MEMS Sensor;Signal Conditioning Integrated Circuit