单束飞秒激光诱导自组装周期微纳结构形成机理和调控方法研究

项目名称： 单束飞秒激光诱导自组装周期微纳结构形成机理和调控方法研究

项目编号： No.61205128

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 宋娟

作者单位： 江苏大学

项目金额： 25万元

中文摘要： 微纳结构阵列在微光学器件、功能材料和信息科学等多个领域有着广泛应用。与纳米压印、电子束刻蚀技术、离子束刻蚀技术、化学气相沉积等微纳结构制备方法相比，飞秒激光微加工方法具有对透明材料进行可选区三维体加工的独特魅力。传统的飞秒激光加工方式是焦点直扫法，属于串行加工模式，多用于早期微加工中；近年来，考虑到加工效率的问题，飞秒激光并行制备微纳结构的技术引起人们极大关注。其中飞秒激光诱导自组织周期微纳结构的技术已经成为近年来的研究热点。尽管飞秒激光诱导自组装周期微纳结构的报道已不少，但是目前对飞秒激光诱导自组织周期微纳结构的形成原因并没有一个普遍接受的的统一物理模型。本项目拟在系统研究透明介质表面和内部自组装微纳结构形成条件基础上，理论模拟激光与透明材料表面和内部的相互作用，探索单束飞秒激光诱导自组装周期结构的形成机理，开拓飞秒激光在材料表面及其内部高速地、可靠地以及可控地形成周期性微纳结构的新技术

中文关键词： 飞秒激光；自组装；微纳结构；形成机理；数值模拟

英文摘要： Micro/nanostructure arrays have wide applications in various fields such as micro-optics devices, functional materials, information science，etc. Compared to nanoimprinting lithography,electron beam lithography,ion beam lithography and chemical vapor deposition, femtosecond laser micromaching has a unique advantage of three-dimensional region-selective processing of transparent dielectrics. The traditional fs-laser processing method is to scan the focus on the sample, which belongs to a serial processing style and is usually used in early-stage micromaching.In recent years, to promote the micromaching efficiency, parallel preparation of micro/nanostructure arrays by femtosecond laser has aroused great interest,among which the technique of femtosecond laser inducing self-assembly micro/nanostructures has become a research hotspot in recent years.Although there have been various reports related to femtosecond laser induced self-assembly micro/nanostructures, no widely-accepted physical model has been proposed to elucidate the formation mechanism of femtosecond laser induced self-assembly micro/nanostructures. In this project, based on systematic study of formaton conditions of femtosecond laser induced self-assembly micro/nanostructures on the surface of and in the bulk of transparent dielectrics, we will theoretic

英文关键词： femtosecond laser；self-assembled；micro/nanostructure；formation mechanism；numerical simulation