新型铁电薄膜可调微波器件的设计、制备与应用研究

项目名称： 新型铁电薄膜可调微波器件的设计、制备与应用研究

项目编号： No.61302046

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 盛苏

作者单位： 湖北师范学院

项目金额： 26万元

中文摘要： 近年来，可调微波器件（如移相器、共振器、滤波器等）在先进雷达和移动通讯系统有着巨大的应用需求。铁电材料在可调微波器件应用上吸引了广泛的关注。虽然目前已经有大量基于铁电薄膜集成微波应用的报道，但是实现铁电薄膜在可调微波器件上的商业应用，还有许多挑战需要克服。本项目中，我们提出了一种混合型变容二极管（hybrid varactor）结构，它集合了传统的平行板和共面型变容二极管结构的优点。我们将采用封闭形式的场分析对混合变容二极管结构进行电磁理论分析；利用射频模拟软件（HFSS）设计和优化变容二极管的结构；利用BaxSr1-xTiO3 铁电薄膜及合适的高电阻电极层材料（如SrRuO3, LSMO等）制作铁电混合型变容二极管；设计、制备基于混合型变容二极管的可调微波电路，如移相器、滤波器等。本项目旨在发展微波器件的微型化、高可调性、宽频带和低成本等，实现铁电薄膜材料在可调微波器件方面的商业应用。

中文关键词： 铁电薄膜；变容二极管；介电性能；HFSS仿真；微波移相器

英文摘要： Tunable microwave devices (such as phase shifter, resonator, filter, etc.) provide added functionality, smaller form factor, lower cost, and lighter weight, and are in great demand for future communications and radar applications. Ferroelectric thin films (such as BaxSr1?xTiO3, BST), have attracted much attention due to their simple processes, low power consumption, high power handling, small size, and fast tuning for microwave applications. Nowadays, there are an extensive number of reports on the integration of ferroelectric thin films for microwave applications. However, there are still many challenges to be solved. For example, the major disadvantage of using ferroelectric thin films for tunable microwave devices is their relatively high dielectric loss tangent which leads to microwave dissipation. The electrical means of improving the total quality factor (Q factor) of tunable microwave devices have not been implemented. Varactors are crucial components in RF and microwave devices. We propose a new structure of ferroelectric thin film hybrid varactor, which integrates the features of both structures of coplanar and parallel plate varactors and hopefully maintain the merit of their component structures. The first part of the plan is to investigate in detail on how the presence of the high resistivity DC bias

英文关键词： Ferroelectric thin films；Varactor；Dielectric properties；HFSS simulation；Microwave phase shifters