嵌入式电极侧向场激励薄膜体声波谐振器研究

项目名称： 嵌入式电极侧向场激励薄膜体声波谐振器研究

项目编号： No.61204124

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 金浩

作者单位： 浙江大学

项目金额： 24万元

中文摘要： 侧向场激励薄膜体声波谐振器（FBAR）作为一种新型的可工作于液相环境的射频MEMS器件，是目前高灵敏度生物传感器中最具竞争力的方案，但是，该技术当前主要存在寄生模式较多、液体中Q值衰减较大等缺点。本项目提出了一种嵌入式电极侧向场激励的FBAR结构，通过寄生模式频谱的搬移，实现高Q纯剪切波谐振。主要研究内容及目标有：①研究侧向场激励FBAR器件的多物理场耦合、寄生模式以及结构对Q值的影响等机制，提出一种通过搬移寄生模式频谱来获得高Q纯剪切波谐振模式的方法；②提出一种嵌入式电极侧向场激励高Q纯剪切波谐振模式的FBAR结构，使其能适合于液相环境的生物传感应用。申请者已经对这种结构的FBAR进行了初步的理论分析与有限元研究，取得了一定的研究成果，验证了其可行性。通过本项目的实施，有望获得具有自主知识产权的高性能FBAR传感器的核心技术，对FBAR传感器在生物传感领域的应用具有推动作用。

中文关键词： 薄膜体声波谐振器；嵌入式电极；柔性电子；声表面波器件；传感器

英文摘要： Lateral field excited thin film bulk acoustic resonator (FBAR) is one of the most promising RF MEMS technologies for biosensor applications due to its relative high sensitivity in liquid, but there are still some shortcomings, such as the exist of spurious modes and the reduction of Q value in liquid environment. We proposed a novel lateral field excited FBAR with embedded electrodes, which has the advantages of pure shear mode resonance and high Q in liquid environment. These outstanding features are achieved by moving the spectra of spurious modes far away from the main shear mode resonant frequency. The main research contents and objectives are: ①Investigate the multi-physics coupling, spurious modes and the facts that affects Q value of lateral field excited FBAR, and then propose a novel method to achieve high Q value and pure shear mode resonance by moving the spectra of spurious modes far away from the main shear mode resonant frequency; ②Propose a novel embedded electrodes structure of lateral field excited FBAR, which is suitable for biosensor applications due to the pure shear mode resonance and relative high Q value in liquid. We have investigated the proposed structure with a preliminary theoretical analysis and finite element study, and obtained some results that verified the feasibility of this pro

英文关键词： Thin film bulk acoustic resonator；embedded electrodes；flexible electronics；surface acoustic wave；sensor