基于接触区几何形貌的微纳粘着和界面现象演化规律的AFM研究

项目名称： 基于接触区几何形貌的微纳粘着和界面现象演化规律的AFM研究

项目编号： No.51505250

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 机械、仪表工业

项目作者： 赖添茂

作者单位： 清华大学

项目金额： 22万元

中文摘要： 微纳粘着是微机电系统(MEMS)在制造和使用中失效的一个主要原因。它的研究在微观摩擦机理的探索方面也有重大的理论意义。本项目以原子力显微镜(AFM)粘着力测量较差的重复性为出发点，基于接触区几何形貌建立纳米级粘着计算模型，数值求解并与AFM实验作对比，以深化对单峰接触的认识。针对以往参数影响研究的片面性，基于不同的环境和接触区几何形貌，采用相互作用和因素的分离技术，研究加载速率、停留时间和分离速度三者中两两间的耦合效应。针对界面现象规律认识不足的现状，基于接触区两表面相对位置的调节和改变参数作对比的方法，通过在同一位置上多次重复的接触-分离和力-位移曲线的分析，来探讨毛细液体桥的形成与破裂、接触起电和分子吸附膜的结构形态等表面现象的发生机理及其演化过程，以达到进一步地认识微纳粘着的目的。本项目将对粘着机理的认识有理论意义，对粘着力实验有参考意义，对解决各种工况下的粘着问题有指导意义。

中文关键词： 微纳粘着；表面力；接触几何；界面现象；原子力显微镜

英文摘要： Micro-nano adhesion is a major reason for the failure of micro-electromechanical systems (MEMS) in manufacture and in use. The research of micro-nano adhesion is of great theoretical significance in the exploration of micro-friction mechanisms. The adhesion force measurements by an atomic force microscopy (AFM) have poor repeatability. Based on the geometry of the contact zone, the project will establish a computational model of the nanoscale adhesion. The model will be solved by numerical methods. The solution will be compared with the results of AFM experiments, to deepen the understanding of the single-asperity contact. The study of the influence of AFM parameter on the adhesion force has some shortcomings. Based on different environments and contact geometries, using the separation technology of the interaction and influencing factors, the project will study the coupling effect of every two of the loading rate, dwell time and separation speed. The evolution laws of interfacial phenomena have not been understanded yet. Based on the adjustment of the relative position of two contacting surfaces and the comparison method for changing parameters, by repeated contact-separation on the same position and the analysis of force-displacement curves, the project will investigate the occurrence mechanism and evolution process of the formation and rupture of capillary liquid bridges, contact electrification, the structural morphology of molecular adsorption films, in order to further the understanding of the microscopic adhesion. This project will have theoretical significance in understanding the mechanism of the adhesion, reference value for adhesion force experiments, and guiding significance in solving adhesion problems in various engineering cases.

英文关键词： micro-nano scale adhesion;surface force;contact geometry;interfacial phenomenon;atomic force microscope