柔性电子卷到卷制造中异质结构可控转移与层合机理

项目名称： 柔性电子卷到卷制造中异质结构可控转移与层合机理

项目编号： No.51475195

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 陈建魁

作者单位： 华中科技大学

项目金额： 85万元

中文摘要： 柔性电子器件以其独特的柔性/延展性以及高效、低成本制造工艺，在信息、能源、医疗等领域具有广泛应用前景。本项目围绕柔性电子器件卷倒卷制造中异质结构可控转移与层合的基础科学问题，从材料特性、工艺机理和控制方法等方面开展多学科交叉研究：提出卷到卷剥离工艺参数、异质膜粘弹性行为对界面能量释放率的影响模型，获取薄膜可剥离的判定准则及可控剥离的工艺窗口；揭示运动参数、取/放力和界面力对异质结构精确取/放转移的影响规律，建立层合界面翘弯失稳的力学模型；揭示多层膜同时卷绕进给过程中速度参数、膜内张力、对位误差等对层合行为的影响机理，建立面向连续层合的多参数优化控制模型，提出超薄薄膜精确进给的非连续张力/位置混合控制方法；突破卷倒卷制造中多层柔性异质结构可控剥离、精确取/放转移、连续层合等关键技术，为柔性电子制造装备的研制提供理论基础和技术源泉。

中文关键词： 卷到卷制造；柔性电子；可控转移；连续层合；张力控制

英文摘要： The flexible electronics devices have wide application prospect such as information, energy and national defense,because of the flexibility, ductility, efficient and low cost manufacturing process.This project aims at the controllable transportation and lamination of neterogeny structure in roll-to-roll manufacturing process, from the material properties, process mechanism and control methods etc., to carry out the multidisciplinary crossover study.The influence model of interfacial energy release rate process is proposed for peeling parameters and viscoelasticity behavior,and the criteria for substrate peeling and the controllable process window should be obtained.Disclose the impact principle of motion parameters,pick-place force and interfacial force for pricise tranportation, and establish the mechanical model of bending instability of the laminating interfaces.The multi-parameter optimization control model of continuous laminating for multi-ultra-thin substrates is be set up, based on the analysis of velocity,internal tension and position error, and one discontinuous tension/position hybrid control method is raised for substrates' precise positionings. Break through the key technologies,including controllable peeling,accurate pick-place transportation and continuous laminating,in the multi-layer neterogeny structure's roll-to-roll manufacturing, to provide the theoretical basis and the source technology for flexible electronics manufacuring equipments.

英文关键词： roll-to-roll manufacturing;flexible electronics;controllable transportation;continuous laminating;tension control