石墨烯纳米网的可控制备及其红外探测性能研究

项目名称： 石墨烯纳米网的可控制备及其红外探测性能研究

项目编号： No.51502294

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 一般工业技术

项目作者： 欧阳浩淼

作者单位： 中国科学院合肥物质科学研究院

项目金额： 21万元

中文摘要： 针对目前无机半导体型红外探测器存在的电子迁移率低、工作温度低、制备工艺复杂等问题，本项目探索在二氧化硅/硅基体上制备石墨烯纳米网红外探测器。以超薄TiO2孔阵列薄膜为掩膜，实现二氧化硅/硅基体上大面积石墨烯纳米网的制备。可控调节石墨烯纳米网的结构参数以调控其带隙，进而实现石墨烯基红外探测器件的性能优化和按需设计。研究所获得的石墨烯纳米网对光电响应性能的影响，揭示石墨烯纳米网的结构参数与红外光电响应性能之间的关系；确定实现高性能红外探测所需的结构参数。本项目的开展，不仅具有重要的学术意义，而且将为高性能红外探测器提供新的材料和方法。

中文关键词： 石墨烯纳米网；TiO2多孔掩膜；红外探测；带隙调控；高性能

英文摘要： In view of the existing problems such as low electron mobility, low operating temperature, complicated preparation processes, etc. of inorganic semiconductors based infrared detectors, this project explores the fabrication of infrared detector based on graphene nanomesh on Si/SiO2 substrate. We expect to use ultra-thin porous TiO2 arrays membrane as etching mask to prepare graphene nanomesh. The method can adjust the structural parameters and band gap of graphene nanomesh effectively by controlling the structural parameters of porous TiO2 arrays membranes, and thus would realize performance optimization and design of graphene nanomesh based infrared detector according to the needs. We systematically study the impact of the prepared graphene nanomesh on the performance of infrared detector, reveal the the relationship between the structural parameters of graphene nanomesh and the performance of infrared detector, and determine the structural parameters needed for high-performance graphene nanomesh based infrared detector. Smooth implementation of this project, not only has important academic significance but also provides new material and new method for high-performance infrared detector.

英文关键词： Graphene nanomesh;Porous TiO2 mask;Infrared detection;Band gap control;High performance