Eigen frequency is one of the most important system responses to be considered while designing a micro-scale piezoelectric cantilever beam. This paper investigates and analyzes the effect of dimension parameters of a micro-scale piezoelectric cantilever beam on its eigen frequency. The beam is assumed to be made of silicon. Structural mechanics based finite element analysis is carried out in the environment of COMSOL Multiphysics software for the study. It is seen that length and thickness have continuous effect on the eigen frequency; whereas, the effect of width is discontinuous.
翻译:Eigen频度是设计微型派生电力束时需要考虑的最重要系统反应之一。本文调查并分析了微型派生电力束的维度参数对乙型频度的影响。光谱假定用硅制成。基于结构力学的有限元素分析是在用于研究的COMSOL多物理软件环境中进行的。人们看到,长度和厚度对乙型频度有持续影响;而宽度的效果是不连续的。