柔性、透明全碳薄膜晶体管的设计、装配与性能研究

项目名称： 柔性、透明全碳薄膜晶体管的设计、装配与性能研究

项目编号： No.51272256

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 一般工业技术

项目作者： 孙东明

作者单位： 中国科学院金属研究所

项目金额： 80万元

中文摘要： 碳纳米管和石墨烯等新型纳米材料具有优异的电学、光学和力学特性，在柔性电子器件领域具有广阔的应用前景。现有柔性薄膜晶体管器件由于脆性电极或绝缘层材料的使用等原因，未能展现出理想的透明度和柔韧性。本项目提出采用全碳纳米材料制作柔性薄膜晶体管，并研究影响器件性能的关键因素与规律，阐释其性能优化机制。以低密度碳纳米管薄膜为沟道材料、高密度碳纳米管薄膜或石墨烯薄膜为电极、聚合物材料为绝缘层，设计装配全碳薄膜晶体管器件。将重点考察碳纳米管性质及其网络结构对晶体管器件性能的影响，分析全碳纳米材料界面接触机制对晶体管性能优化的作用，阐明厚绝缘层碳纳米管薄膜晶体管可低电压工作的机理。研究分离顶栅结构晶体管器件制作的关键工艺，系统考察全碳薄膜晶体管在电学、透光性、柔性及可塑性等方面的独特性能，为实现高性能、柔性、透明、可塑的新型碳纳米电子器件提供科学基础。

中文关键词： 碳纳米管；石墨烯；薄膜晶体管；柔性电子；

英文摘要： Novel nanomaterials such as carbon nanotube and graphene have great potential applications in flexible electronics devices, due to their excellent electrical, optical and mechanical properties. The transparency and flexibility of current devices are somewhat limited by the use of rigid electrodes and insulators in thin-film transistors. In this proposal, we propose all-carbon nanomaterials thin-film transistors, in which the active channels are formed by a sparse carbon nanotube thin-film, passive elements by a dense carbon nanotube thin-film or graphene layer, and dielectric by a polymer. We will investigate the key effects to improve the performances of transistors, including nanotube properties and its network structure, contact mechanism of the interfaces between all-carbon nanomaterials. We will also clarify the theory of low-voltage operation for the carbon nanotube thin-film transistor with a thick insulator layer. We will fabricate the transistors with a split top-gate configuration and evaluate the perforamnces in terms of electrical, transparent, flexible and moldable properties. The results obtained in this proposal will pave the way for fantastic flexible electronics with high-performance, flexibility, transparency and moldability.

英文关键词： Carbon nanotube；Graphene；Thin-film transistor；Flexible electronics；