氦离子辐照烧结碳化硅损伤效应的研究

项目名称： 氦离子辐照烧结碳化硅损伤效应的研究

项目编号： No.11475229

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 李炳生

作者单位： 中国科学院近代物理研究所

项目金额： 100万元

中文摘要： 探索氦离子辐照烧结碳化硅损伤过程以及损伤演化机理，不但可以澄清、验证和拓广现有的氦离子辐照碳化硅损伤理论，深化对碳化硅内部辐照缺陷引起材料韧性和热导率变化规律的认识，而且还可以为制备先进功能的半导体器件提供重要帮助。利用兰州重离子加速器提供的氦离子辐照烧结碳化硅，通过多种测试手段和分析方法，研究氦离子辐照烧结碳化硅内部氦泡、纳米空腔的盘状团簇的形成机理，澄清它与氦的另一类二维缺陷-盘状气泡的形成机理的联系与区别，探索气泡、空腔周围间隙型缺陷的形核和生长规律，并进一步研究辐照损伤对材料韧性和热导率性能的影响。在此基础上，通过综合分析现有实验数据，并根据氦离子辐照损伤基本理论和数值模拟，建立烧结碳化硅内部氦泡和纳米空腔生长模型，并从理论上解释碳化硅氦脆和热传导性能退化的原因，为碳化硅作为核能材料和今后利用纳米空腔缺陷工程制备新型超大规模集成电路芯片提供科学依据。

中文关键词： 辐照损伤；离子辐照；核材料；损伤机理；纳米结构

英文摘要： Study of process and evolution of irradiation-induced damage in He irradiated sintered SiC, which can not only clarify, validate and develop the current theory of irradiation-induced damage of He irradiated SiC, further the knowledge of irradiation-induced defects which lead to the change of fracture and thermal conductivity, but also supply important data for fabricating advanced semiconductor facilities. In the project, using He ions which are provided by HIRFL irradiated sintered SiC. Combined with kinds of measurements and analyses, we will pay attention to the formation mechanism of planar nano-scale bubbles/cavities in He irradiated sintered SiC, distinguishing from the relationship of two-dimensional defects which are planar helium bubbles, to explore the nucleation and growth of interstitial-type defects in the vicinity of bubbles/cavities, and research further the effects of irradiation-induced damage on material ductility and thermal conductivity. What's more, we are going to establish a growth model of helium bubbles and nano-cavities in sintered SiC based on thoroughly analyzing the experimental results and data simulation, and the basic theory of damages produced by He irradiation. In addition, we are going to use the theories to explain the mechanism of He embrittlement and the deterioration of thermal conductivity. The investigations will supply a scientific foundation of SiC as a kind of nuclear materials and for fabricating chips of new grand scale integration by using nano-scale cavities in future.

英文关键词： Irradiation damage;Ion irradiation;Nuclear materials;Damage theory;Nanostructure