基于光纤传感的表面特征多尺度集成检测技术与方法研究

项目名称： 基于光纤传感的表面特征多尺度集成检测技术与方法研究

项目编号： No.51275259

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 李玉和

作者单位： 清华大学

项目金额： 90万元

中文摘要： 表面质量检测与评价是制造技术的核心基础与关键。先进制造及纳米制造发展对加工及表面质量的远程、多尺度一体化检测要求越来越高，对现有检测技术与方法提出了新挑战。本项目将开展光纤调制传感技术、压电纳米驱动、微探针扫描探测、多参量神经网络分析等关键技术与方法研究；探究表面轮廓特征成型机理，设计光纤与微探针集成化探测头，研究多尺度特征一体化测量关键技术与方法；采用非序列光线追迹法进行光强与表面波纹度、粗糙度等特征参数耦合关系追迹仿真；探索基于光纤位移传感与微探针扫描探测的表面特征尺寸检测新方法；分析微探针敲击模式二次及高阶谐波规律，探索工作预置点快速定位方法；基于BP网络分类提取表面轮廓多尺度多特征参数及数据可视化；构建基于光纤位移传感、微探针探测、压电扫描与神经网络处理的表面轮廓参数集成一体化检测系统，检测范围：50mm×50mm，实现高检测效率与在线测量便携化，为表面质量分析提供测量评价手段。

中文关键词： 光纤传感；特征检测；微探针；数值仿真分析；表面质量

英文摘要： The surface quality inspection and measurement are the core foundation of advanced manufacturing technology and key issues. With the development of super finishing and nano-manufacturing the requirement of remote and multi-scale integration measurement for surface quality become more higher, and it would raise some new challenges to the existing technology and methods. The project would carry out the research of optical fiber modulation sensing technology, nano scale piezoelectric driving technology, micro-probe scanning for the surface characteristics and so on. At the same time some study would be done in this project, including exploring the surface forming mechanism, study on the key issues in the detection of multi-scale surface featuresm, the optimization of nonlinear model for PZT driving and positioning, analysis on the key measurement methods for the morphology and feature size with the integration of optical fiber sensing and micro probe scanning, study on visual data processing technology, separation methods of surface profile, micro-roughness and form errors, digital three-dimensional re-construction, at last building an experimental system for surface quality measurement based on multi-scale integrated optical fiber sensing, with working range: 100mm x 100mm, positioning resolution 2nm. The project

英文关键词： Optical fiber sensing；Feature measurement；Micro probe；numerical approximation and analysis；Surface quality