MEMS振荡器电路非线性相位噪声机理的实验研究

项目名称： MEMS振荡器电路非线性相位噪声机理的实验研究

项目编号： No.61204033

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 贺林

作者单位： 中国科学技术大学

项目金额： 30万元

中文摘要： MEMS振荡器具有批量生产、低成本的优点，有望取代有源石英晶振，应用前景巨大。然而目前其相位噪声性能还达不到通信、高精度传感器等高端应用的指标，原因是由于对其机理认识不够深入。我们的前期工作初步完成了MEMS振荡器相位噪声机理的理论体系构建，并进行了数值仿真与初步的电路实验研究。我们的理论模型推翻了Clark Nguyen等人提出的混沌机理假设，且与数值仿真结果相符，但与电路实验的结果存在差异。针对这一问题，本课题将展开深入的理论与实验研究，探明并实验验证相位噪声的机理，完善理论模型，从而寻找抑制相位噪声的方案。本课题的研究工作，与前期工作一起构成完整的MEMS振荡器相位噪声机理的研究，为大幅度提升MEMS时间基准及谐振式传感器的性能，突破其高精度应用的瓶颈，实现MEMS谐振器大规模产业化，提供理论基础、实验依据及解决方案。

中文关键词： 振荡器；相位噪声；电流效率；数字控制振荡器；MEMS

英文摘要： MEMS oscillator may be expected to replace the active quartz crystal to get extensive market applcation due to low cost and DFM characteristics. However, the phase noise performance can not arrive at the requirement of signal communication, high-precision sensors and high-end applications due to poor understanding of noise physics based mechanism. Our preliminary work initially completed the theoretical analysis of the MEMS oscillator phase noise mechanism, and numerical simulation based circuit experiment. Our theoretical model breaks down the assumption of the chaotic mechanism by Clark, Nguyen, et al., and is consistent with the numerical simulation results ,but a little different from the circuit experimental results .To solve this problem , this project performs intensive theoretical and experimental work, to experimentally verify mechanism of the phase noise, and to improve the theoretical model, in order to find the method to suppress phase noise. This project results together with the previous work consist of a complete study on MEMS oscillator phase noise mechanism , which provides a theoretical basis, experimental evidence and design solutions for us to greatly enhance the performance of the MEMS time basis and the resonant sensor, which breaks down the bottleneck of high-precision applications, rea

英文关键词： oscillator；phase noise；current efficiency；digital controlled oscillator；MEMS