紫外光诱导纳米颗粒胶体射流加工新技术基础研究

项目名称： 紫外光诱导纳米颗粒胶体射流加工新技术基础研究

项目编号： No.51205180

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 宋孝宗

作者单位： 兰州理工大学

项目金额： 25万元

中文摘要： 自由曲面光学元器件在光传输、光电子学等领域具有重要的应用价值，亚纳米级超光滑表面的制造是制约其广泛应用的瓶颈。本项目提出利用纳米颗粒显著的表面效应和化学吸附能力，借助紫外光场的光催化作用，诱导胶体射流中纳米颗粒与工件表面间的界面反应，实现自由曲面光学元器件亚纳米级超光滑表面的加工。本项目将首先研究紫外光场与胶体射流动压场之间的能量耦合规律，探索紫外光诱导纳米颗粒胶体射流加工过程中亚纳米级超光滑表面形成的微观机理；在此基础上，建立紫外光诱导纳米颗粒胶体射流加工中材料去除的物理化学模型和描述主要工艺条件与加工表面质量之间关系的预测模型；最终掌握紫外光诱导纳米颗粒胶体射流加工超光滑表面的关键技术，为实现亚纳米级超光滑表面制造提供理论及技术支持。该项目的成功实施，将为自由曲面光学元器件的亚纳米级超光滑表面制造提供一种高效率、高精度的超精密加工新技术。

中文关键词： 超光滑表面；纳米颗粒；纳米加工；胶体射流；紫外光诱导

英文摘要： Free-form optical components have important application value in many science and technology fields, such as optical transmission and opto-electronics, the manufacture of sub-nanometer ultra-smooth surface is the bottleneck restricting its wide range of applications. Because of the obvious surface effect and chemical adsorption abilities of nanoparticles, the interface reaction between the nanoparticles in the colloid jet and the workpiece surface will be induced by the photocatalysis of applied ultraviolet light field, and the manufacture of sub-nanometer ultra-smooth surface for free-form optical components can be achieved in the process of ultraviolet light induced nanoparticle colloid jet machining. In this project, firstly the law of energy coupling between the ultraviolet light field and the pressure field of colloid jet will be studied, and the microcosmic formation mechanism of sub-nanometer ultra-smooth surface in ultraviolet light induced nanoparticle colloid jet machining will be explored. On this basis, the physical and chemical model of material removal in the ultraviolet light induced nanoparticle colloid jet machining will be established, and the prediction model to describe the relationship between the main process conditions and the machined surface quality will also be set up. Finally, the key

英文关键词： Ultra smooth surface；Nanoparticle；Nano fabrication；Colloid jet；Ultraviolet light induced