精密电子制造装备中轴向移动结构的振动主动控制问题研究

项目名称： 精密电子制造装备中轴向移动结构的振动主动控制问题研究

项目编号： No.61203060

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 自动化学科

项目作者： 刘屿

作者单位： 华南理工大学

项目金额： 24万元

中文摘要： 本项目以精密电子制造装备中大加速度轴向移动结构的振动控制为研究对象。基于主动控制思想，采用在线/离线相结合的控制方案，设计融合智能控制技术的鲁棒自适应边界控制方法，对轴向移动结构的振动进行主动控制，实现主动控制理论及方法在精密电子制造装备中的应用。具体研究内容：1）基于轴向移动结构的动力学和几何非线性特性分析，建立表征结构振动特性的动力学模型；2）综合考虑控制功能、算法和时间指标等各方面要求，确定满足控制系统高实时性的控制方案；3）直接面向结构无限维偏微分方程模型，设计融合智能控制技术的鲁棒自适应边界控制算法，避免控制溢出现象，并对系统稳定性进行理论分析和数学证明；4）在自主SMT装备研制平台，将设计的鲁棒自适应边界控制算法嵌入到软件系统开展实验研究，验证其稳定性、可靠性和有效性。本项目的成功实施，将为轴向移动结构的振动主动控制提供理论依据和方法，并可推广到其他柔性结构的振动主动控制中。

中文关键词： 轴向移动系统；大加减速；振动主动控制；边界控制；稳定性

英文摘要： In this project, the study is focused on the vibration control for axially moving system with high acceleration of precision electronic manufacturing equipment. Based on active vibration control idea and online/offline combined control scheme, robust adaptive boundary control algorithm combining with intelligent control technology is developed for governing the vibrations of axially moving system, and the theory and method of active vibration control are successfully applied to the precision electronics manufacturing equipment. The detail research content as following: 1)The dynamic model which characterized the structural vibration can be developed after dynamic analysis and geometric nonlinear characteristics analysis of axially moving system. 2) The high real-time control scheme aslo can be achieved after considering all aspects of requirements, such as control function, control algorithm and work time. 3) Robust adaptive boundary control algorithm combining with intelligent control technology is developed which control design are based on the original infinite dimensional partial differential equation. The spillover phenomenon is avoided. Theoretical analysis and mathematical proof for stability of axially moving system will be carried out. 4) In our SMT design platform, the proposed robust adaptive boundary

英文关键词： Axially moving system；High acceleration/deceleration；Active vibration control；Boundary control；Stability