可调带隙铝-铟氧化物半导体薄膜材料的制备及性质研究

项目名称： 可调带隙铝-铟氧化物半导体薄膜材料的制备及性质研究

项目编号： No.51272138

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 一般工业技术

项目作者： 马瑾

作者单位： 山东大学

项目金额： 80万元

中文摘要： 用MOCVD方法制备可调带隙的铝-铟氧化物（Eg:3.7-8.7eV）紫外透明半导体薄膜材料，系统地研究薄膜的晶格结构、相变、光学和电学性质随薄膜中铝铟组分的变化关系。研究衬底材料与铝铟氧化物薄膜的晶格适配及制备工艺条件对薄膜性能的影响；研究薄膜的组分变化对铝铟氧化物薄膜材料带隙宽度的调制作用；研究薄膜中缺陷和杂质及掺杂对薄膜光电性质和光致发光性能的影响，研究薄膜材料的能带结构、导电机理和发光机制。铝铟氧化物薄膜具有带隙宽度大且可以通过改变薄膜组分进行调制的特点，是一种很有希望的异质结和量子阱材料。结晶质量高、性能优良的铝铟氧化物薄膜材料在透明光电器件、短波长发光器件、紫外探测器、太阳电池和平面显示等领域具有实际的应用前景。对铝铟氧化物薄膜结构和光电性质随组分的变化进行系统地研究，将为该材料在光电器件上的实际应用奠定良好的基础。因此，该项研究即具有重要的科学意义又具有潜在的应用价值。

中文关键词： 铝-铟氧化物；可调带隙；半导体薄膜；微观结构；光电性质

英文摘要： UV transparent Aluminium-Indium oxide（Eg:3.7-8.7eV） semiconductor film materials with a tunable band gap will be prepared by metal-organic chemical vapour deposition method. Crystal lattice structure, structural phase transition, optical and electrical properties of the obtained films which changed with the film composition will be investigated by the numbers. Substrate materials, crystal lattice match and technological conditions,et al. that influence on the properties of Al-In oxide films will be also investigated. The modulating action of band gap width resulting from the films composition will be studied. The defects, impurity and dopant in the Al-In oxide films that influence on the properties of the films will be studied. The energy band structure, optical and electrical properyies of the Al-In oxide films will be investigated as well as the conductive principle and the luminescence mechanism. Al-In oxide film materials with a band gap tunable by the film composition is a promising heterojunctions and quantum wells material. High crystallinity Al-In oxide materials with fine performances can be used in many field sach as transparent photoelectrical devices, short wavelength light emission devices, UV light detector, solar cell and flat-panel display. Research on structure, optical and electrical propertie

英文关键词： Aluminium-Indium oxide；tunable band gap；semiconducting films；micro-structure；optical and electrical properties