Sol-Gel氧化硅减反膜的耐环境稳定性研究

项目名称： Sol-Gel氧化硅减反膜的耐环境稳定性研究

项目编号： No.11304228

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 数理科学和化学

项目作者： 王晓栋

作者单位： 同济大学

项目金额： 30万元

中文摘要： 基于溶胶-凝胶（Sol-Gel）技术制备的SiO2减反膜由于具有可调的折射率、较高的激光损伤阈值、便于大面积镀膜、易于大规模工业化生产、成本低廉等优点，在高功率大型激光器用光学元件、太阳能电池用减反射玻璃、大屏幕显示系统玻璃等领域得到了广泛的应用。但Sol-Gel 氧化硅具有较高的孔隙率，使得其更容易吸附使用环境中的污染物，从而降低其光学性能和抗激光损伤特性，缩短使用寿命。本项目从溶胶特性和膜层结构的基础性研究入手，研究不同胶体结构、表面基团对减反膜耐环境稳定性的影响。通过对溶胶的改性、薄膜表面的功能化和超薄氟化物保护层的引入，获得具备较高耐环境稳定性、抗激光损伤性能、耐阳光辐照以及优异减反射性能的Sol-Gel减反膜制备参数。为大面积减反膜在延长使用寿命、增加耐候性等方面提供科学的解决方案。

中文关键词： 溶胶-凝胶技术；减反膜；稳定性；；

英文摘要： Sol-gel derived antireflective (AR) coatings have presented extensive application in many fields such as optical components for high power lasers, solar glass and large screen display systems owing to their advantages of controllable refractive index, high laser induced damage threshold, low cost, high possibility of mass production and capability of large coating size. However, the sol-gel silica coatings have a high porosity that is more susceptible to be contaminated by absorption of contaminants from the environment, which reduces their AR efficiency and laser resistance. In this project, the fundamental research of sol properties and coating structures will be conducted to study the effect of sol structures and surface groups on the environmental stability of the AR coatings. Through the modification of the sol, functionalization of the coating surface and deposition of ultra-thin fluoride protective film, the sol-gel AR coatings with high environmental stability, laser resistance, solar radiation resistance and excellent AR efficiency would be successfully prepared. Thus it could provide a scientific solution to improve the durability and weatherability of lager scale AR coatings.

英文关键词： Sol-Gel Technology；Antireflective Coatings；Stability；；