磁镜场中空心阴极溅射金属等离子体研究

项目名称： 磁镜场中空心阴极溅射金属等离子体研究

项目编号： No.11475011

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 数理科学和化学

项目作者： 付东坡

作者单位： 北京大学

项目金额： 82万元

中文摘要： 一系列双空心阴极金属离子源（DUHOCAMIS）的放电实验结果表明，这种离子源放电曲线具有大范围变化弧流阻抗的特性，且与磁镜场中空心阴极溅射金属等离子体密切相关。本项目将基于DUHOCAMIS平台，进行多参数系列的金属等离子体放电实验与分析，结合数值计算模拟，研究磁镜场对于空心阴极溅射金属等离子体的形成与发展的影响规律与作用机制，进一步揭示这种新的离子源结构的物理本质与其作为一种新的金属离子源的基本属性；应用KOBRA3-INP软件进行带有磁场计算的离子源引出与传输系统的三维设计，改善DUHOCAMIS平台的离子束引出和传输效率。通过执行本项目不仅为进一步研发DUHOCAMIS夯实物理基础；而且基于对磁镜场影响空心溅射阴极金属等离子体的研究，还可探讨调整等离子体器壁附近磁场来降低器壁溅射腐蚀的可能性或途径，分析讨论磁镜场影响溅射的基础性问题。

中文关键词： 离子源；等离子体；金属离子；溅射

英文摘要： A scientific research project is proposed based on the DUHOCAMIS (Dual Hollow Cathode Metal Ion Source) test bench and its discharge experiments as an ion source, in which it has been found that the arc currents and their resistance could be adjusted in a wide range and both of them were closely related to the bottle-shaped magnetic field of the source. In this proposed project, a series of discharge experiments with multi-parameters on the DUHOCAMIS and different numerical simulations will be done; and the research works will be mainly focused on three aspects: 1) the effects and their mechanism of the bottle-shaped magnetic field to the cathode-sputtered metallic plasma, also the possibility of reducing the cathode-sputtering(erosion) by regulation of the magnetic field; 2) to further understand the function of the bottle-shaped magnetic field in the DUHOCAMIS as a new kind of metal ion sources; 3) to improve the design of the ion extraction and transportation system of DUHOCAMIS using KOBRA3-INP software with a special attention to the remote magnetic fields. This research will have both theoretical and practical values in the fields of ion/plasma sputtering and its applications to metal ion plasma, metal ion sources and metal ion beams.

英文关键词： ion source;plasma;metal ions;sputter