金属雕塑薄膜生长动力学及可控制备研究

项目名称： 金属雕塑薄膜生长动力学及可控制备研究

项目编号： No.61275159

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 江绍基

作者单位： 中山大学

项目金额： 86万元

中文摘要： 大角度倾斜沉积金属材料并辅以基底运动可以制备出各向异性的金属雕塑薄膜，其多孔且形貌可控的结构特点使之具有传统薄膜所没有的光电特性，可广泛应用于微纳光电器件领域。从微观尺度上探讨微纳金属雕塑薄膜生长机理，对于理解其生长过程、控制生长条件、提高薄膜制备质量以及开发新型薄膜器件具有重要的理论价值及应用意义。本项目将在已有的工作基础上，采用第一性原理分子动力学和动力学蒙特卡罗相结合的方法对金属雕塑薄膜的生长过程进行理论计算和计算机模拟；建立合理准确的金属雕塑薄膜动力学标度理论；研究各种制备参数如沉积温度、沉积速率、基底运动方式和基底预结构对金属雕塑薄膜生长过程的影响，并通过实验实现其量化可控制备。本项目的开展将为开发新型微纳薄膜器件提供理论依据和制备方法，并使其在光电子学、光通信、生物化学传感等领域得以实际应用。

中文关键词： 金属雕塑薄膜；动力学自组织；Ag直柱阵列；薄膜生长机制；

英文摘要： Anisotropic metal sculptured thin films can be fabricated by glancing angle deposition. Due to the porous and controllable structures, metal sculptured thin films with the novel optial and electrical characteristics are very different from traditional optical thin films. These characteristics of sculptured thin films can be widely used in micro-nano optoelectronic device field. Exploring the growth mechanisms of the metal sculptured thin films in the microscopic scale plays a very important role in theoritical value and practical application. Precise understanding of the growth process could help us improve the quality of fabrication and develop novel optoelectronic thin films. Based on our previous work, the growth process of metal sculptured thin films will be explored by first-principle molecular dynamics and kinetic Monte Carlo. Accurate metal sculptured thin films dynamic scaling theory will be established. Through the research of temperature, deposition rate, rotation mode in metal sculptured thin films growth process, the controllable fabrication of metal sculptured thin films will be achieved. The results of this project will provide theoretical basis and available fabrication method of new micro-nano films. Besides, the practical results will be applied in optoelectronics, optical communications, bioche

英文关键词： metal sculptured thin films；kinetic self-assembling；Ag columnar array；thin film growth mechanism；