深紫外波段亚波长金属光栅的反转偏振特性研究

项目名称： 深紫外波段亚波长金属光栅的反转偏振特性研究

项目编号： No.61205053

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 康果果

作者单位： 北京理工大学

项目金额： 25万元

中文摘要： 亚波长偏振器件是近年来国际光学领域的一个研究热点，它是指由光学各向同性物质（如传统介质和金属）组成但整体表现出强烈光学各向异性的微纳人造结构，其偏振特性源于结构的亚波长性，而非组成材料本身。亚波长结构的双折射率较自然双折射晶体提高了几个数量级，其作为高质量的偏振器件，适用波段从微波一直扩展到可见光。然而对于深紫外波段(100<λ<200nm)，传统亚波长偏振器件因其设计周期需远小于入射光波长（d<20nm），远超出现有微纳制作水平（d～100nm）而无法被实际制作出来。为此，本课题研究作用于深紫外波段并且周期接近入射光波长的反转偏振金属光栅，在前期研究基础上对金属光栅在该波段出现反转偏振透射的机理展开系统性研究，并探索有效降低器件透射损耗的方法。利用现有标准微纳工艺，争取研制出偏振消光比优于100:1的反转偏振片。该项目的研究前景是发展出一类新型高集成度偏振调控器件，服务于深紫外光电系统。

中文关键词： 亚波长光学；偏振控制；表面等离子体激元；深紫外偏振片；

英文摘要： Subwavelength polarizing device is a research focus in optics field for the past few years. It is a micro-nano artificial structure,which is made of optically isotropic materials,such as traditional dielectric or metal,that exhibits highly anisotropic properties. The properties do not originate from its consisting material, but its subwavelength structure. The birefringence of subwavelength device is several orders of magnitude higher than that of natural crystals. As a high-quality polarizing device, its working band ranges from microwave to visible light. However, in the deep ultraviolet (DUV) band (100～200nm), the traditional subwavelength device with very fine grid of metal wires (say, with period&lt;20nm) has to be used, which makes the fabrication extremely difficult or even impossible with current technology.Thus,in this project, we plan to investigate an inverse polarizer working in DUV band with its period close to the incident wavelength. Based on our pilot studies, we will try to reveal the underlying physics of inverse polarizing effects of subwavelength metallic gratngs in DUV band and seek for an effective approach to reduce the energy loss. By using the standard micro-nano fabrication technology, we aim to develope an inverse polarizer with polarization extinction ratio better than 100:1 in DUV band

英文关键词： Subwavelength optics；Polarization control；Surface plasmon polaritons；DUV polarizer；