ZnO/Ga2O3核壳微米线的制备及高性能日盲紫外探测器的研制

项目名称： ZnO/Ga2O3核壳微米线的制备及高性能日盲紫外探测器的研制

项目编号： No.11504367

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 数理科学和化学

项目作者： 王飞

作者单位： 中国科学院长春光学精密机械与物理研究所

项目金额： 24万元

中文摘要： 由于在军事和民用上广泛的应用前景与目前迫切的应用需求，基于宽禁带半导体的日盲紫外探测器已经成为光探测器研究领域的一大热点。但由于三元合金AlGaN与ZnMgO薄膜的晶体质量与分相问题仍未得到根本解决，严重制约了探测器性能的提升。本课题以提高日盲紫外探测器的性能为研究目标，提出采用一次化学气相沉积方法，利用生长温度的不同，先后生长结晶质量好、光电导增益高的一维ZnO核与禁带宽度对应于日盲紫外波段的Ga2O3壳层，制备出不依赖于衬底、不需要昂贵设备和复杂的工艺来掺杂调带隙、核层与壳层均为单晶的ZnO/Ga2O3核壳微米线。依靠ZnO核与Ga2O3壳所构成的特殊能带结构，制做具有高响应度、快速相应时间的日盲紫外探测器件，并阐明核壳微米线中载流子分布及输运机制，明确核壳微米线在探测器性能提高中所发挥的功能与起到的作用，为日盲紫外探测器的研制提供一种新结构与新思路，也为一维微纳器件的实用化奠定基础。

中文关键词： 核壳微米线；日盲紫外探测器；化学气相沉积

英文摘要： Due to their broad prospects and urgent requirements in military and civilian applications, wide-band-gap semiconductor based solar-blind UV detector has become a hot research field. However, the crystal quality and phase separation problems of ternary AlGaN and ZnMgO thin films have not yet been solved, which has seriously hampered the performance of the detector. For improving the performance of solar-blind UV detector, a material that don’t need lattice-matching substrates, don’t require expensive equipments and complex doping processes to tune the band gaps of materials is needed. The band gap of Ga2O3 is 4.5 eV, which corresponds to the solar-blind ultraviolet spectral region. One-dimensional ZnO materials have good crystal qualities and high photoconductive gains, more importantly, the growth of ZnO microwire don’t need a lattice-matching substrate. So in this research project, depending on the different growth temperatures of ZnO and Ga2O3 materials, we use a one-step chemical vapor deposition method to grow one-dimensional ZnO core and Ga2O3 outer shell one after another. Relying on the special band structure of ZnO/Ga2O3 core/shell microwire, we will make a solar-blind UV detector with a high responsivity and fast response time, then clarify the carrier distribution and transport mechanisms of core-shell micronwire, make sure the role the core and shell have played in performance improvement. This work will not only provide a new structure and new idea to get high performance solar-blind UV detector, but also lay the foundation of practical one-dimensional micro-nano devices.

英文关键词： core/shell microwires;solar-blind UV detector;chemical vapor deposition