ZnO多层薄膜声表面波血糖传感器及关键材料研究

项目名称： ZnO多层薄膜声表面波血糖传感器及关键材料研究

项目编号： No.51302173

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 一般工业技术

项目作者： 罗景庭

作者单位： 深圳大学

项目金额： 25万元

中文摘要： 糖尿病是世界性的三大危险疾病之一，频繁测试血糖是糖尿病诊断和治疗的基础。目前多数血糖传感器成本高、灵敏度低、易受干扰，因而研制高可靠、低成本的血糖传感器具有重大科学意义和广阔应用前景。本项目基于声表面波器件对质量负载高度敏感的特点，提出利用声表面波传感技术来检测血糖，制作新型低成本高性能的ZnO多层薄膜声表面波血糖传感器（SAWGB）。研究适用于Love波SAWGB的高质量、大压电系数的ZnO薄膜生长和择优取向控制，以及中间层选择和厚度设计对ZnO多层薄膜器件机电耦合系数、插入损耗和工作频率的影响机理；在敏感区涂覆pH敏感膜并固定葡萄糖氧化酶构建ZnO多层薄膜SAWGB。深入分析ZnO多层薄膜SAWGB中ZnO压电材料、中间层材料和敏感膜材料制备和优化对SAWGB性能的影响规律，阐明影响Love波ZnO薄膜SAWGB性能的机制，为制备高性能ZnO多层薄膜SAWGB提供理论依据和实验指导。

中文关键词： ZnO薄膜；中间层；声表面波生物传感器；血糖检测；

英文摘要： Diabetes is one of the three dangerous diseases in the world. Frequent blood sugar testing is necessary for diabetes diagnosis and treatment. However, most of the commercial glucose sensors are of high cost, low sensitivity and vulnerable by interference. Therefore, the development of high-reliability and low-cost glucose sensor has great scientific significance and broad application prospect. Based on the high sensitivity of surface acoustic wave (SAW) device to mass load, this project proposes the use of SAW sensing technology to detect glucose, fabricating a new type of low-cost and high-performance glucose sensor based on ZnO multilayer film SAW device (SAWGB). Three main research contents will be included in this project. Firstly, the growth of ZnO film with high-quality and large piezoelectric coefficient and the control of its preferred orientation.Secondly, the influence of the interlayer on the electromechanical coupling coefficient, insertion loss and operating frequency of ZnO multilayer structure SAW device. Thirdly,the fabrication of ZnO multilayer films SAWGB by coating the sensitive area with pH-sensitive polymer which is bio-functionalized by glucose oxidase immobilization. The effect of preparation and optimization of ZnO piezoelectric material, buffer-layer and sensitive film on the performance

英文关键词： ZnO thin film；interlayer；surface acoustic wave biosensor；glucose measurement；