UMG硅衬底上垂直有序微纳硅孔阵列太阳电池研究

项目名称： UMG硅衬底上垂直有序微纳硅孔阵列太阳电池研究

项目编号： No.61076053

项目类型： 面上项目

立项/批准年度： 2011

项目学科： 化学工业

项目作者： 赵雷

作者单位： 中国科学院电工研究所

项目金额： 15万元

中文摘要： 在高纯冶金级（UMG）硅衬底上制备了阳极氧化铝（AAO）模板，发现在高电压，高磷酸浓度的乙二醇溶液中能获得孔径较大且均匀的模板。采用金属催化电化学刻蚀方法可以在电阻率较低的硅衬底上制备出孔径较大的微孔阵列，并具有很好的均匀性和高的深宽比。通过等离子体化学气相沉积（PECVD）成功在硅孔阵列上制备了径向pn结非晶硅/晶体硅异质结（HIT）太阳电池，获得了3.67%的转换效率。本项目证实了在低质量硅衬底上通过低温HIT太阳电池工艺制备径向pn结太阳电池的可行性，同时也发现了进一步提高效率所存在的一些问题。目前，对径向pn结太阳电池的研究是国际上的研究热点，本项目所研究的这种太阳电池将UMG硅材料的低成本与纳米线太阳电池的高陷光高载流子收集特性和HIT太阳电池的优异界面钝化特性有机结合起来，能够成为制备低成本高效率硅太阳电池的有效途径。并且没有发现国际上有类似的相关报导。因此，本项目值得继续做进一步的深入优化研究。

中文关键词： UMG硅；金属催化电化学刻蚀；微纳硅孔阵列；HIT太阳电池

英文摘要： Anodic aluminum oxide (AAO) template was fabricated on upgraded metallurgical grade (UMG) silicon substrates. It was found that the high voltage and the high H3PO4 concentration in glycol solution were preferred to make uniform AAO template. Vertically ordered micro-nano hole array could be obtained on low-resistivity Si substrates by metal-assisted electrochemical etching. Such hole array had relative large hole diameter, good uniformity and high aspect ratio. Amorphous/crystalline (HIT) silicon solar cell was successfully fabricated on the obtained hole array. The primary best conversion efficiency was 3.67%. The results indicated that it was possible to make radial pn junction solar cell on low quality Si substrates by low temperature processes. At the same time, some problems were pointed out to improve the solar cell performance further. Nowadays, radial pn junction solar cell is a research hot topic all over the world. This program combines the advantages of the low cost of UMG silicon, the high collection efficiency of radial pn junction and the excellent surface passivation of HIT solar cells, having a large potential to fabricate silicon solar cells with low cost and high performance. Similar ideas to this program are still not reported in the world. So, it is worth doing the further investigation and process optimization systematically.

英文关键词： UMG silicon; Metal-assisted electrochemical etching; micro-nano silicon hole array; HIT solar cell