新型硅基有序纳米尺寸多孔硅复合结构气敏传感器研究

项目名称： 新型硅基有序纳米尺寸多孔硅复合结构气敏传感器研究

项目编号： No.61271070

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 胡明

作者单位： 天津大学

项目金额： 85万元

中文摘要： 纳米气敏传感器是新一代高性能传感器领域发展趋势和研究重点。提出一种以硅基有序纳米尺寸多孔硅复合低维纳米气敏材料构建室温响应高性能气敏传感器的研究。研究内容：硅基有序纳米尺寸多孔硅复合低维纳米敏感材料系统气体探测机制及内在规律；硅基有序纳米尺寸多孔硅微结构理论设计计算及性能模拟、实验制备关键技术与气敏特性表征方法；硅基有序纳米尺寸多孔硅复合低维纳米气敏材料气敏传感器的构筑及性能；复合结构气敏传感器稳定性。研究的必要性在于改变目前硅基多孔硅气敏传感器多基于孔道无序的介孔尺寸多孔硅，难于在孔壁表面均匀形成有效纳米复合以提高器件性能的现状；突破尺寸在几十至一百纳米、高度有序排列且具高孔隙率的硅基多孔硅研究瓶颈；解决硅基有序纳米尺寸多孔硅复合结构气敏传感器关键技术。在低维纳米气敏材料在硅基有序纳米多孔硅中可控复合、纳米协同效应在增强和调制气敏传感器性能、硅基低功耗气敏传感器的机理和关键技术上创新。

中文关键词： 硅基多孔硅；有序；纳米；复合结构；气敏传感器

英文摘要： Nano-gas sensor has become a new research focus and tendency in the field of high performance gas sensors. This project is proposed to form high-performance silicon-based gas sensors of low-dimensional nano-composite structures on ordered nano-size porous silicon which operated at room temperature. Theoretical and experimental studies will be conducted as following: gas detection mechanisms and inherent laws of silicon-based gas sensors with low-dimensional nano-composite structures on ordered nano-size porous silicon; theoretical calculations and performance simulations of micro-structure, the key technologies of the preparations and descriptions of gas sensing properties; the architectures and gas sensing properties of gas sensors with low-dimensional nano-composite structures; the stability of nano-composite structural gas sensors. The necessity of this project is to change the present research status that it's difficult to evenly form nano-composite structures on the pore wall surface of porous silicon due to the disorder channel of meso-porous silicon. At the same time, the research will break the bottleneck that it's hardly form silicon-based porous silicon with highly ordered array holes and high porosity in size of tens to one hundred nanometers. Additionally, key technologies will be studied to form ne

英文关键词： porous silicon；ordered；nanometer；composite structure；gas sensor