磁控形状记忆合金驱动的大行程纳米级精度微动工作台关键技术研究

项目名称： 磁控形状记忆合金驱动的大行程纳米级精度微动工作台关键技术研究

项目编号： No.50805042

项目类型： 青年科学基金项目

立项/批准年度： 2009

项目学科： 金属学与金属工艺

项目作者： 纪华伟

作者单位： 杭州电子科技大学

项目金额： 20万元

中文摘要： 本项目研究基于磁控形状记忆合金等智能材料的微动工作台实现大行程纳米级分辨率微位移过程中的关键技术问题。针对微动工作台高响应速度、高定位精度、大行程以及大驱动力的定位要求，引入新型磁控形状记忆合金，利用其大形变量、高频响以及驱动力大的特点，实现大行程精密定位。通过与压电陶瓷等智能材料的对比和分析，研究了磁控形状记忆合金等智能材料基本特性，设计了MSMA驱动的大行程致动器，构建了MSMA致动器的动力学模型以及智能材料的迟滞非线性模型。研究了不同类型柔性铰链及柔性定位机构，设计了双平行四杆微动工作台，建立了基于LabVIEW的MSMA驱动的微动工作台的测试平台，与柔性微位移导轨相结合构建了微动工作台系统，测试了压电以及磁控形状记忆合金微动工作台性能；为提高其定位精度，利用基于柔性铰链的柔性微位移导轨同时解决磁控形状记忆合金致动器形变恢复和微位移导向问题；引入输入整形技术，设计系统残余振荡控制器，减小工作台动态误差，将模糊控制技术应用到精度控制中，降低稳态误差，提高了工作台定位精度。 项目的研究对提高精密定位技术水平具有重要的科学意义与应用价值。

中文关键词： 磁控形状记忆合金；微动工作台；压电陶瓷；精度控制；迟滞

英文摘要： In this project, the key technology of magnetic shape memory alloys actuated stage with large travel and nanometer resolution was studied. For the requirement of high response speed, high positioning accuracy, large travel and high driving force of micro-displacement stage, magnetic shape memory alloys was introduced to realize precision positioning for its characteristics of long deformation amount, high frequency response and high driving force. The characteristics of magnetic shape memory alloys and piezoelectric actuator were analysed and compared， large travel actuator was designed, kinetic model of MSMA actuator and hysteresis model of smart materials were built up; a compound parallel four bar mechanism was proposed by analyed several kinds of flexure hinges and compliant mechanism.two test experiment platform for micro- displacement platform of MSMA and piezoelectric actuator based on labview was built up. In order to improve the positioning accuracy, a flexure hinge mechanism is designed to realize deformation recovery and displacement guidance of magnetic shape memory actuator, input shaper and fuzzy controller were proposed to eliminate residual vibration and reduce steady state error to enhance positioning accuracy of proposed micro-displacement stage.

英文关键词： magnetic shape memory alloys; micro-displacement stage; piezoelectric actuator; percision control;hysteresis