基于电迁移现象的铝纳米线阵列制备方法及机理研究

项目名称： 基于电迁移现象的铝纳米线阵列制备方法及机理研究

项目编号： No.51305165

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 机械、仪表工业

项目作者： 鹿业波

作者单位： 嘉兴学院

项目金额： 23万元

中文摘要： 金属纳米材料制备是新材料领域的前沿课题。在集成电路和微机电系统中，铝纳米线由于具有导电性好、成本低、制作工艺相对成熟等特点，已成为最常用的组成材料之一。制备铝纳米线的传统方法已逐渐无法满足工业化生产要求，基于电迁移现象制备铝纳米线具有高效率、成本低和操作简单等优点，极具工业化批量生产潜力。但是目前这一方法制备成功率低且无法实现大批量制备，根本原因在于试样设计缺陷和铝纳米线阵列制备理论的欠缺。本课题针对这一问题，研究铝纳米线制备过程中铝原子的迁移和积聚规律，定量分析铝原子在生长区域内的积聚机理，提出铝原子积聚排出的动平衡模型，结合各影响因素分析铝原子的控制方法以提高制备成功率，设计新型试验工艺和试样结构，以成功实现铝纳米线阵列的高效制备，并通过试验验证该制备方法的可靠性，为实现工业化生产奠定理论和试验基础。

中文关键词： 铝纳米线阵列；电迁移；原子迁移；微机电系统；失效机理

英文摘要： Metallic micro and nano materials are very attractive due to their applications in micro electromechanical systems (MEMS). Fabrication of metallic nanomaterials is one of the most advanced research in material industry. Aluminum has been the main component in the integrated circuits and MEMS due to its conductivity, low cost and advantages in lithographic process. The traditional approach cannot meet the requirements for industrial production of Al nanowires since the approach has its limitations arising from the wavelength, precision and manipulation. Electromigration, which is a physical phenomenon, can be used to effectively fabricate Al nanowires. However, it is still difficult to obtain naowire array with high yield due to absence of mechanism of Al nanowire array fabrication. In this research, the mechanism of atomic migration and accumulation in the nanowire growth process will be investigated. The accumulation of Al atoms in the predetermined area will be quantitatively analyzed, and a balance model for accumulation and discharge of Al atoms will be proposed. An understanding of the mechanism for nanowire array fabrication is needed to enable repeatability. Furthermore, new sample structure and experimental procedures will be designed, and the mechanism will be utilized to fabricating Al nanowire array t

英文关键词： Al nanowire array；Electromigration；Atomic migration；MEMS；Failure mechanism