We propose and experimentally demonstrate the enhancement in the filtering quality (Q) factor of an integrated micro-ring resonator (MRR) by embedding it in an integrated Fabry-Perot (FP) cavity formed by cascaded Sagnac loop reflectors (SLRs). By utilizing coherent interference within the FP cavity to reshape the transmission spectrum of the MRR, both the Q factor and the extinction ratio (ER) can be significantly improved. The device is theoretically analyzed, and practically fabricated on a silicon-on-insulator (SOI) wafer. Experimental results show that up to 11-times improvement in Q factor, together with an 8-dB increase in ER, can be achieved via our proposed method. The impact of varying structural parameters on the device performance is also investigated and verified by the measured spectra of the fabricated devices with different structural parameters.
翻译:我们提出并实验性地展示了综合微环共振器过滤质量(Q)系数的提高,将其嵌入由级联Sagnac环反射器(SLR)构成的集成法布里-Perot(FP)腔。通过在FP腔内使用连贯的干扰来改变MRR的传输频谱,Q系数和消亡率(ER)都可以大大改进。该装置在理论上进行了分析,并且实际上在硅隔热器(SOI)瓦费尔上制造。实验结果表明,Q因子的11倍改进,加上ER的8DB增加,可以通过我们提议的方法达到。不同的结构参数对设备性能的影响也通过结构参数不同的合成装置的测量光谱来调查和核实。