面向多组份气体定量检测的ZnO纳米线阵列可控制备方法研究

项目名称： 面向多组份气体定量检测的ZnO纳米线阵列可控制备方法研究

项目编号： No.51205273

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 邓霄

作者单位： 太原理工大学

项目金额： 25万元

中文摘要： 本项目是在当前工业安全、环境保护、医学检测和国防军事等领域对混合气体痕量检测方法有较大需求的背景下，以开发高灵敏度、高选择性、对多组份气体具有精确检测功能的微纳气体传感器为切入点，提出利用微流道阵列的方法实现纳米线的可控生长，探索在相同条件下，不同长径比、不同贵金属掺杂的ZnO 纳米线与待测气体的吸附与脱附特性；通过建立气体分子吸附模型、微流道温度场和流体场的数学模型，借助专业化的第一性原理和有限元与多物理场建模软件平台，开展分子表面相互作用机理、微流道阵列与基底之间ZnO 纳米线可控生长机理以及微纳气敏单元新工艺、新结构的研究；并在此基础上借助MEMS 设计和制造技术，实现微纳气体传感器结构的最优设计与微型化制造，提高传感器对多组份气体的检测灵敏度与稳定性，为开发具有混合气体痕量检测功能的微纳气体传感器奠定理论和技术基础。

中文关键词： 氧化锌纳米线；可控制备；气体传感器；微流控；密度泛函理论

英文摘要： To detect mixed minimal gas is crucial in many applications, e.g., industrial safety, environment protection, medical detection and national defense, however, demand of novel accurate observing method remains urgent. Aiming at developing NEMS/MEMS based gas sensor, which is of high sensitivity, high selectivity, low power consumption, portable in terms of detecting mixed minimal gas, a method of controllable nanowires growth utilizing microfluidic array is proposed in this project. This method can realize under the same experimental conditions, absorbing behaviors were investigated well between measuring gas and ZnO nanowires with different long ratio and different doped noble-metal. By establishing mathematical models of microfluidic's temperature field and fluid field as well as gas adsorption model, relying on software platform (CASTEP and COMSOL), three following mechanisms: molecular interface interacting mechanism, vertical growing mechanism of ZnO nanowires between microfluidic array and substrate, and the new structure of micro-nano gas sensing unit , are fully investigated. Furthermore, with MEMS design and fabricating techniques, optimized design of gas sensor's structure can be realized. Meanwhile, the goal of improving the detection sensitivity and stability on the multi-component gas can be reached.

英文关键词： ZnO nanowires；controllable preparation；gas sensors；microfluidic；density functional theory