亚光波长微分干涉相衬光子筛偏振成像特性研究

项目名称： 亚光波长微分干涉相衬光子筛偏振成像特性研究

项目编号： No.61275170

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 谢常青

作者单位： 中国科学院微电子研究所

项目金额： 70万元

中文摘要： 基于将常规光子筛分别沿水平和垂直方向进行两次相切的新思路，提出了微分干涉相衬光子筛器件新概念。该器件充分继承传统光子筛衍射模式优越等优点，将物体相位梯度变化信息转换为相应光强信息，从而大大提高透明或弱吸收物体成像分辨力。基于严格电磁场理论，建立亚光波长微分干涉相衬光子筛准随机排列微纳小孔布局设计方法和偏振成像物理模型，研究轴对称偏振光束器件机理、产生方法和聚焦特性，利用其独特光场分布进一步提高成像质量。基于成熟电子束+X射线混合光刻方法，集成研制出亚光波长微分干涉相衬光子筛和轴对称偏振光束器件。利用光刻胶曝光法重构点扩散函数，并基于CCD进行偏振成像性能检测，提供偏振成像基础实验数据，研究偏振状态改变、数值孔径、入射波长、入射角和微纳米小孔布局对相衬成像质量影响规律。为微分干涉相衬光子筛在纳米光刻、集成电路掩模版衬基检测、生物组织光学成像、轻型望远镜等领域应用提供理论依据和技术储备。

中文关键词： 菲涅耳波带片；光子筛；微分干涉；微分干涉相衬复合光子筛；准周期小孔

英文摘要： Based on the novel idea of placing two phase-cuts horizontally and vertically at the center of a normal photon sieves respectively,we proposed a novel diffractive optical element called differential-interference-contrast photon sieves(DIC-PSs),which fully inherite the superior advantages of the diffraction patterns of normal photon sieves. DIC-PSs can convert the object phase gradient to the corresponding light intensity, thus improve the imaging resolution for transparent or low absorbing objects significantly. The principles, generation method and focusing properties of axially symmetric polarized beams will also be investigated,which will further improve the image quality by using their unique optical field distribution.By using electron-beam and X-ray mixed lithography, we will finish the fabrication of sub-wavelength DIC-PSs and the diffractive optical elements for the generation of axially symmetric polarized beams .We will reconstruct the point-spread-function of sub-wavelength d DIC-PSs by using photoresist exposure method, and characterize the performance of polarization imaging through CCD, and provide the experimental datas for polarization imaging in the sub-wavelength range. We will explore the influence of the polarization, numerical aperture, the laser wavelength，incident angle and the layout

英文关键词： Fresnel zone plate；phton sieve；Differential-interference-contrast；DIC compound photon sieve；quasicperiodic pinhole