强静电场作用下离子导电聚合物和金属键合机理与界面组织性能表征

项目名称： 强静电场作用下离子导电聚合物和金属键合机理与界面组织性能表征

项目编号： No.51275332

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 刘翠荣

作者单位： 太原科技大学

项目金额： 80万元

中文摘要： 采用性能良好的离子导电聚合材料作为新型的MEMS封装键合材料，可改善电子封装电性能，降低键合温度，减小封装残余应力，提高微电子器件封装的质量。本项目拟以P(EO)n-LiX系离子导电高分子固体电解质和金属类（Al、单晶硅等）材料的单层和多层（3和5层）封装技术为背景，设计制备适合与金属Al等材料键合的离子导电高分子固体电解质；研究强静电场下离子导电高分子固体电解质非晶区域中受极化基体链段运动促进锂离子的移动及其键合的规律；离子导电聚合物材料与金属键合过程中的荷电粒子传输热力学条件和动力学过程、荷电粒子的聚集和键合机制；键合界面的电化学反应特征及其键合机理；键合界面生成物微观组织结构特征和界面性能表征；键合冷却过程中温度和应力应变分布规律，以及对键合质量的影响。研究成果将有效的促进离子导电聚合物材料在微电子行业更好的应用，具有重要的科学意义和应用价值。

中文关键词： 封装；高分子固体电解质；络合；阳极键合；

英文摘要： Ionic conductive polymeric materials with excellent performances, a new MEMS packaging bonding material, can not only improve the electrical performance of the electronic package, decrease the bonding temperature, reduce the residual stress of package bonding, but also improve the quality of microelectronic device packages. Based on the single and the multiple (3 and 5) layers packaging technology of P(EO)n-LiX ion conductive polymer solid electrolyte and metal (as Al,Si etc) materials, this project is intending to design and fabricate the ion conductive polymer solid electrolyte that can be bonded with metal Al etc; the laws of the anodic bonding and that polarization matrix chain segment movement promoting lithium-ion movement in the amorphous region of ion conductive polymer solid electrolyte in the intense electrostatic field will be investigated; the transfer thermodynamic conditions and dynamics, and mechanisms of gathering and bonding of charged particles in the bonding process of the ion conductive polymer material and the metal will be analyzed; the electrochemical reaction characteristics of the bonding interface and the bonding mechanisms will also be investigated; and microstructure and property of the bonding interface between the ion conductive polymer and metals in the strong electrostatic field w

英文关键词： packaging；solid polymer electrolytes；complexing；anodic bonding；