基于级联的半导体激光器和微环谐振腔的异质集成光传感器研究

项目名称： 基于级联的半导体激光器和微环谐振腔的异质集成光传感器研究

项目编号： No.61307073

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 无线电电子学、电信技术

项目作者： 宋金岩

作者单位： 浙江大学

项目金额： 24万元

中文摘要： 本项目的研究目标是设计、制作和检测一种高灵敏度的、光源集成的、可应用于生物和环境检测的光波导传感器。该传感器包含有一个基于磷化铟（InP）材料的法布里-珀罗（FP）激光器和一个基于SOI材料的微环谐振器（MRR）。利用FP激光器与微环谐振腔之间产生的游标效应，可提高检测的灵敏度。该传感器将利用键合技术，将FP激光器与微环制作在同一块芯片上，这将大大降低器件成本并且提高器件的可靠性与稳定性。光源发出的光经过垂直耦合，由SOI片上制作的高灵敏度微环谐振腔结构检测。芯片将与微流体通道结合，实现微量液体样品的检测。本项目将建立完整的理论模型，并在实验上验证该传感器的优越性。最终制作出一种集成化、低成本、高精度、可广泛应用于生物检测和环境监测的新型集成传感器。

中文关键词： 微环谐振器；游标效应；倒装键合；免疫传感器；分子印迹技术

英文摘要： The goal of this project is to design, fabricate and characterize the actvie and passive integrated optical sensor with high resolution and small footprint which can be used in biological and enviromental sensing.The sensor is consist of a Fabry-Perot(FP) laser based on InP and a micro ring resonator (MRR) based on SOI. The FP laser and MRR can produce Vernier effect in order to improve the sensitivity of the sensor. The sensor is using wafer bonding technique to integrate the laser with the MRR, which will significantly diminish the coupling loss and improve the reliability and stability of the sensor. The emission from the laser can be vertically coupled into the passive waveguide based on SOI and then coupled with the MRR. The sensor chip with the laser source can be integrated with microfluidic channel in order to test tiny amout of liquid sample. This project will establish the theoratical modal and verify the advantages of the hybridly integrated optical waveguide sensor. Finally, the novel high-resolution, active and passive integrated, and low-cost optical waveguide sensor will be built, which can be applied to the fields of biology, healthcare, enviorment and food industry.

英文关键词： Micro ring resonator；Vernier effect；Flip-chip bonding；Immunosensors；Molecular Imprinting technique