周期磁场约束化学气相沉积金刚石的研究

项目名称： 周期磁场约束化学气相沉积金刚石的研究

项目编号： No.21271188

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 数理科学和化学

项目作者： 余志明

作者单位： 中南大学

项目金额： 80万元

中文摘要： 首次采用周期磁场（Periodically Magnetic Field, PMF）与化学气相沉积（Chemical Vapor Deposition, CVD）耦合方法，以期降低CVD金刚石的沉积温度、控制其晶体生长模式和改善原位掺杂效果。首先，理论分析运动磁场PMF对CVD等离子体中带电粒子（特别是电子）运动的制约，以及这种运动受约电子与CVD气相中的分子和晶体的生长表面原子发生碰撞的规律。从而了解PMF对CVD动力学的影响。在此基础上，设计、制备周期磁场（PMF频率变化范围和磁场强度不同）约束化学气相沉积耦合系统（PMF-HFCVD systems）。利用该系统试验研究周期磁场变化频率、磁场强度和磁场移动线速度对CVD金刚石的形核、生长模式、生长速度、原位掺杂等的影响，找出其影响规律。本研究可能在CVD金刚石的低温生长、定向生长、原位掺杂等方面取得突破。

中文关键词： 化学气相沉积；周期磁场；金刚石；晶体生长；掺杂

英文摘要： In this proposal, a new method is firstly proposed that chemical vapor deposition (CVD) is coupled in a periodically magnetic field (PMF). At first, it is going to study its behavior of electron in CVD plasma under the PMF condition theoretically. The role of the restricted electron by the PMF in energy transformation and a consequent effect on kinetics of CVD diamond shall also be theoretically studied. Based on the theoretical understanding, a PMF-HFCVD system is, therefore, designed and manufactured for the CVD diamond. It will explore the effects of the frequency (ω), the linear speed (VM) and the strength (B) of the PMF on the nucleation, growth and doping of the CVD diamond. It is expected that the new PMF-CVD method would gain some achievements in low-temperature nucleation, oriented growth and effective doping of the CVD diamond.

英文关键词： CVD；periodically magnetic field；Diamond；Crystal growth；Doping