项目名称: 硅基混合集成的微芯片激光器相关基础研究
项目编号: No.61275145
项目类型: 面上项目
立项/批准年度: 2013
项目学科: 无线电电子学、电信技术
项目作者: 刘媛媛
作者单位: 中国科学院半导体研究所
项目金额: 92万元
中文摘要: 由于尺寸可以做得很小, MOMES系统中的光源大都首选LD或LED。但LD的光 束质量差,使其难以单独发挥激光所具有的优势,比如高亮度、高相干性、超短脉冲、单纵 模等等。本项目基于一种将不同材料的微光学组件混合集成在硅基衬底上的自由空间硅基混 合集成技术,配合使用体硅各向异性腐蚀工艺和表面微加工工艺制作硅基的微型光学基板和 微光学夹持片,搭建一个可重复装配的、微型的、硅基的光学试验平台和操作平台,从而开 展微芯片激光器的硅基集成相关实验研究。主要包括将半导体激光器、微光学透镜、体Bragg 光栅、微芯片激光晶体首先分别与不同种类的微光学夹持片集成,然后再单片集成在微型光 学基板上,实现百mW级、TEM00模输出。微芯片激光器实现硅基集成,有望成为替代LD光 源的一种可行的解决方案,为获得一种新型的、可以和MOEMS系统兼容的高亮度激光光源奠 定研究基础。
中文关键词: 微芯片激光器;混合集成;硅基;微光学平台;
英文摘要: Size can be done is small,the light source in the MOEMS system is mostly preferred the LD or LED. While the bad beam quality of LD make it difficult to be separately used as the laser source with the high brightness, high coherence, ultrashort pulses, sigle longitudinal mode. Micro-optical components made up of different materials are integrated in the silicon substrate by using the technology of free space hybrid integration that provide a viable solution for new MOEMS system. Using bulk silicon anisotropic etching technology and surface micromachining technology to produce silicon-based micro-optical substrate and micro-optics holder piece to build a repeatable assembly of miniature optical test platform and assembly platform. Based on this platform semiconductor lasers, micro-optical lens, volume Bragg grating, microchip laser crystal are firstly integrated with different types of holders, and then monolithically integrated to the micro-optical substrate. At a result we can achieve a new type of high-brightness laser light source in several hundreds mW level and the TEM00 mode output which can be integrated easily in the new MOEMS system.
英文关键词: micro chip laser;hybrid integration;silicon-based;micro-optical platform;