光学微扫描显微热成像系统理论与关键技术研究

项目名称： 光学微扫描显微热成像系统理论与关键技术研究

项目编号： No.61501396

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 高美静

作者单位： 燕山大学

项目金额： 23万元

中文摘要： 显微热成像系统不仅能观测物体的形状细节，还能观测温度变化的细节，因此对需要进行细微热分析的领域具有重要作用。前期研制的微扫描显微热成像系统存在缺乏性能评价参数、微位移误差模型未建立等问题，这些问题的解决可为系统优化设计提供理论支撑。为此，将基于显微热成像机理、辐射度学、建立系统的噪声等效温差（NETD）、噪声等效辐射率差（NEED）的数学模型并分析其内在联系，为系统设计提供理论指导；建立微扫描位移误差与光学系统、微扫描系统、探测器等关系的理论模型，探讨提高位移精度的可行性方法，优化研制样机一套；研究标准2×2 微扫描过采样图像自适应获取与高分辨力重构理论；探索显微热图像与望远模式热图像的异同并研究显微热图像特有的超分辨力图像处理算法。项目的研究能够进一步完善显微热成像及高分辨力图像处理理论，推进高分辨力显微热成像系统的实用化进程，部分研究成果可直接应用于其他光电成像系统的设计以提高其性能。

中文关键词： 显微热成像；微扫描；噪声等效辐射率度差；微位移误差；高分辨力重构

英文摘要： Thermal microscope imaging systems can not only shape the details of the object, but also observe the details of changes in temperature, so the system have a very important role in nanotechnology, biotechnology, genetic technology, microelectronics, materials science and other fields. There is a lack performance evaluation parameters, micro-displacement error model and other issues yet in the developed system and we will solve these problems to provide theoretical support for system optimization. According to radiometric, thermal radiation law and detector performance, the difference between the micro pattern and the telescopic pattern will be analysed. Then, the mathematical model and instrinsic relationship of noise equivalent temperature difference(NETD), noise equivalent flux density(NEFD)and noise equivalent eradiation difference(NEED) for the system will be established and analysed, which can provide theoretical guidance for system design. We will analysis the model between micro-displacement precision with optical systems, micro-scanning system, detectors, mechanical components and the environment. Then the feasibility of reducing the error will be explored, in the end we will complete to optimize the micro-scanning system and set up a prototype. Based on principle of the Taylor series and micro-scanning, we will proposed a high-resolution reconstruction algorithm and image adaptive acquisition for standard 2×2 micro-scan images. We will explore the similarities and differences of microscopy with the telephoto mode and then the super-resolution image processing theory will be studyed. The research can improve the theory of thermal microscope imaging system and high resolution image processing. In addition it will promote the process of the practical application of high-resolution thermal microscope image system and some theory can be directly applied to the optical imaging system designtion to improve its performance.

英文关键词： thermal microscope imaging; microscanning;noise equivalent eradiation difference;micro-displacement error;high-resolution reconstruction