嵌入压阻硅纳米线的高灵敏VOC气体传感器的研究

项目名称： 嵌入压阻硅纳米线的高灵敏VOC气体传感器的研究

项目编号： No.61501384

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 郭辉辉

作者单位： 西南科技大学

项目金额： 20万元

中文摘要： 挥发性有机物(Volatile organic compounds，VOC)具有很强的毒性和致癌性，研制微型化、易集成、低成本、高灵敏度的气体传感器对保护人体健康和环境具有重要的意义。本项目利用p型硅纳米线的巨压阻效应，采用自上而下的MEMS工艺，将p型硅纳米线作为压敏元件嵌入杨氏模量较低的Parylene膜中制备高性能的力敏换能器，并结合功能化高分子气敏薄膜，研制出高灵敏压阻式VOC气体传感器。本项目深入研究硅纳米线巨压阻效应的形成机理，明晰硅纳米线的各项参数对其压阻特性及电学特性的影响规律，为稳健设计制备压阻硅纳米线提供指导依据；结合气体吸附、扩散理论和弹性薄板理论构建传感器的模型，研究气敏膜吸附气体溶胀形变与力敏薄膜相互耦合机理，优化传感器气敏膜的参数设计；合成功能化金纳米颗粒修饰气敏薄膜，改善传感器的选择性。本项目的研究结果将为研制高性能压阻式VOC气体传感器奠定理论和技术基础。

中文关键词： 微机电气体传感器；挥发性有机气物；压阻硅纳米线；巨压阻效应；聚合物敏感膜

英文摘要： Due to the volatile organic compounds have highly toxic and strong carcinogenesis to human, development of vapor sensor with miniaturization 、easy integration、low cost and high sensitivity has important significance to protect the human health and environment. In this work, the transducer of vapor sensor based on giant piezoresistive effect of the silicon nanowire and low Young's modulus of the parylene material is fabricated by Micro-electro-mechanical processing technology to detect the swelling stress of the vapor sensitive films. This project study of the giant piezoresistive effect formation mechanism of the silicon nanowire and the effect of correlative parameters on the piezoresistive properties and electrical properties of silicon nanowire, which will be benefit for fabricating piezoresistive silicon nanowire. A model of the vapor sensor is presented based on gas adsotption-diffusion theory and elastic plate theory to discuss the coupling mechanism between vapor sensing material and the transducer and optimize the parameters of the vapor sensitive films. Finally，the vapor sensing material are modified with a functionalized gold nanoparticles film to improve the selectivity of the sensor. This project will provide the theory and technology foundation for developing high performance VOC vapor sensor.

英文关键词： MEMS vapor sensor;VOC;piezoresistive silicon nanowire;giant piezoresistive effect ;polymer sensitive film