氮化铌铝/氮化硅双相复合涂层超硬机制和热稳定性研究

项目名称： 氮化铌铝/氮化硅双相复合涂层超硬机制和热稳定性研究

项目编号： No.51461016

项目类型： 地区科学基金项目

立项/批准年度： 2015

项目学科： 一般工业技术

项目作者： 李明升

作者单位： 江西科技师范大学

项目金额： 48万元

中文摘要： 本项目拟利用Nb-Al-Si-N体系的热力学特性，通过控制沉积过程中原位发生spinodal相分离的热力学和动力学条件，在涂层生长过程中自组装形成纳米晶氮化铌铝植入非晶氮化硅的稳定双相复合结构；通过对涂层中可能影响双相复合结构形成的O含量的调控，澄清纳米复合结构的形成机制；并通过在体系中添加少量不固溶于氮化铌铝和氮化硅的稀土元素Y，改变界面结构和界面应变能，调制晶粒尺寸、硬度和韧性；通过对涂层微观结构（相组成、晶粒尺寸、界面结构等）分析、力学性能（硬度、应力、韧性、结合强度、耐磨性等）测试及热稳定性（结构稳定性、高温硬度、抗氧化性能、涂层和基体的互扩散）分析，比较添加和未添加O或Y的涂层在微观结构和性能方面的差异，建立组成、结构、硬度、韧性及热稳定性之间的关系，阐明复合涂层的超硬效应、增韧机制和热稳定性机理，为高温稳定的高硬度、强韧性纳米复合涂层的设计、制备和应用提供理论指导和实验依据。

中文关键词： 氮化铌铝；氮化硅；物理气相沉积；超硬效应；热稳定性

英文摘要： By controlling the conditions of reaction kinetics and thermodynamics of spinodal phase separation of Nb-Al-Si-N system, two-phase nanocomposite coatings composed of nc-(Nb,Al)N and a-Si3N4 will be formed during the coating deposition process. Element O is designed to added to the coatings in order to clarified to the chaminism of the formation of nano-compound stucture. A small amount of yttrium will be introduced into the crystalline boundaries of (Nb,Al)N and Si3N4 to modulate the structure and strain energy of the boundaries. And thus crystalline size will be adjusted and harness and toughness of the coating will correspondinly be changed. Through the comparison and analysis of the differences of micro structures, mechanical properties and thermal stability between (Nb,Al)N/Si3N4 an Y-doped (Nb,Al)N/Si3N4, The relationship between composition, structure, hardness, toughness and thermal stability of the coatings will be established. And the superhardness effect, toughening mechanisms and thermal stability mechanisms will be clarified. And this will provide theoretical guidance and experimental basis for the development of high-performance superhard coatings for micro-drill used in manufacture of printed circuit board.

英文关键词： (Nb;Al)N;Si3N4;PVD;superhard effect;thermalstability