超精密机床流-固耦合界面的宏微尺度动态接触机理研究

项目名称： 超精密机床流-固耦合界面的宏微尺度动态接触机理研究

项目编号： No.51475010

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 机械、仪表工业

项目作者： 陈东菊

作者单位： 北京工业大学

项目金额： 83万元

中文摘要： 随着加工精度和范围要求的提高，超精密机床关键部件越来越多的采用液体和空气静压轴承。由于轴承间隙处于微尺度范畴，所以轴承内流体流态与宏观尺度下不同，以致流体膜与固体之间的耦合非常复杂，目前针对该问题的研究尚未全面展开。本研究试图深入分析超精密机床结构中流-固耦合界面宏微尺度接触机理与功能机制，揭示流-固耦合界面与超精密机床加工工件波纹度之间的影响关系：研究适合微尺度下流体流态的数学表征方法，探索微尺度效应对轴承内流体性能的影响规律；推导宏微尺度下与流体接触的完整和统一的结构运动模型进而阐述流动流体和运动固体的耦合动态行为；通过检测流-固耦合界面静动态特性并对其振动信息和特征进行分析，搭建运动、测量、调节一体化的超精密加工实验平台，提出对流-固耦合动态行为进行预测及调控的有效策略。本课题的研究成果，对阐明超精密机床加工工件波纹度形成机制有重要意义，为超精密机床的加工质量的提高提供新思维。

中文关键词： 超精密机床；流-固耦合；宏微尺度；接触机理；动态特性

英文摘要： With the requirement developing of machining precision and range, more and more aerostatic and hydrostatic bearings are used in the key components of ultra-precision machine tools. Since the clearance of the bearing on the micro scale, the fluid flow of the bearing on micro scale is different from the one on macro scale. The coupling between the fluid and the solid is very complex, till now the study about such question is nearly absence. This research tries to analyze the touch mechanism of the coupling interface of the fluid and solid on macro and micro scale, to explore the relationship and effect between the coupling interface and waviness of the ultra-precision machine tool: flow equations on micro scale are established to reveal the micro scale effect on the fluid laws; the motion model of the structure which touch with the fluid is derived on macro and micro scale to describe the dynamic behavior of the coupled fluid and solid interface; By detecting the coupling interaction of the fluid and solid and analyzing the vibration information and characteristics, the ultra-precision machining experiment platform is built to predict and control the dynamic behavior of the coupled fluid and solid. It is great significance to clarify the formation mechanism of the machining waviness, and provides a new thinking for improve the machining accuracy of ultra-precision machine tools.

英文关键词： Ultra-precision Machine Tool;Fluid-Solid Coupling;Macro and micro scale;Touch Mechanism;Dynamic characteriteristis