基于高阶多极子共振模式的等离子体增强型ZnO基紫外探测器的研究

项目名称： 基于高阶多极子共振模式的等离子体增强型ZnO基紫外探测器的研究

项目编号： No.61475153

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 刘可为

作者单位： 中国科学院长春光学精密机械与物理研究所

项目金额： 82万元

中文摘要： ZnO基半导体具有缺陷密度低，抗辐射性强以及饱和载流子漂移速率高等特性，并可通过Mg的掺杂使得带隙大范围连续可调，因此被认为是制作紫外探测器的最理想材料之一。但是，ZnO基材料相关工艺发展不成熟，特别是高质量的p型掺杂还是个国际难题，这使得现有器件以金属-半导体-金属结构为主，且性能普遍不高。尽管金属表面等离子体被广泛的用来提高光电器件的性能，但是，传统的等离子体增强型探测器通常利用偶极子共振模式，由于偶极子共振峰通常位于可见和红外波段，且共振峰频谱宽，很难在紫外波段实现高效的选择性增强。针对该难题，本项目中我们利用Ag等离子体的四极子共振模式位于紫外波段并且共振峰频谱窄的特性，实现ZnO基材料对紫外波段探测能力的选择性增强。因此，该方法有助于解决传统器件中等离子体偶极子共振模式不能有效增强紫外波段探测能力的问题，从而有望实现高性能的等离子体增强型ZnO基紫外探测器。

中文关键词： 氧化锌；紫外探测器；表面等离子体；四极子；量子效率

英文摘要： ZnO-based semiconductor has been considered as one of the most ideal materials for the application as UV photodetectors due to its low defect density, ultra-high radiation hardness, and high saturated carrier drift velocity. However, the relative technology of ZnO-based materials is not mature. In particular, the high quality p-type doping is still a big challenge. Thus, most devices are based on metal-semiconductor-metal structures, and their performance is usually very poor. Although metal surface plasmonic has been widely used to improve the performance of optoelectronic devices, the efficient enhancement is still difficult to be realized in the UV range for the traditional plasmon-enhanced photodetectors. The reason is that the traditional enhancements are usually based on dipole plasmon resonances, whose peaks are mostly in the visible and IR range and are relatively broad. In this project, we will use the quadrupole plasmon resonance in Ag nanoparticles to solve the above problem.The important advantage of this idea is that the narrow Ag quadrupole resonance peak locates at UV range, and thus can realize an efficient performance enhancement of ZnO-based UV photodetectors with highly wavelength selectivity. Therefore, the method in this project help to solve the problem of inefficient performance enhancement of UV photodetectors by traditional dipole plasmon resonance, and it is expected to realize plasmon-enhanced ZnO-based UV photodetectors with high performance.

英文关键词： ZnO;UV photodetector;surface plasmon;quadrupole;quantum efficiency