基于一维纳米间隙电极约束组装的气敏传感器纳米线原位成形技术研究

项目名称： 基于一维纳米间隙电极约束组装的气敏传感器纳米线原位成形技术研究

项目编号： No.51275401

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 机械、仪表工业

项目作者： 邵金友

作者单位： 西安交通大学

项目金额： 85万元

中文摘要： 针对高性能纳米线气体传感器规模化制造的难题，本项目提出一种基于一维纳米间隙电极介电泳约束组装的气敏传感器纳米线原位成形技术。该技术利用聚合物材料在低能电子束照射条件下精确可控的伸展特性，采用隧道结应力断裂法实现一维纳米间隙电极的大面积并行制造；并利用一维纳米间隙电极在局部空间形成的强电场梯度，通过气体敏感纳米粒子的介电泳力约束组装，在间隙结构内原位实现传感器纳米线的高效精确成形。该技术克服了现有传感器实验制备过程中因依赖纳米线机械操纵方法而存在的局限性和效率问题，可在室温、常压条件下形成高性能集成传感器所需要的任意纳米线结构。本项目将在低能电子束照射下聚合物/金属双层膜系的延展断裂机理、纳米间隙电极约束条件下气体敏感粒子的介电泳组装行为、纳米线的组装方式对传感器性能的影响规律等三个方面探索基础理论，解决其中涉及的关键技术难题，从而为高性能纳米线气体传感器的高效制造发展一种原创性的工艺方法。

中文关键词： 一维纳米间隙；纳米制造；低维材料介电泳组装；纳米线原位成形；柔性纳米传感器

英文摘要： As typical nanomaterials, 1-D nanostructures or nanowires are characterized by unique physical and chemical properties that differ from their macroscopic counterparts and, in particular, by an enhanced chemical reactivity even at room temperature. This effect has stimulated the development of high-sensitive gas sensors. However, it is worth noting that none of nanowire nanosensors has yet emerged as commercially valuable. As an experimental approach, nanowire nanosensors are commonly fabricated by placing the sensitive nanowires on prepatterned electrodes. The existence of possible technological constraints intrinsically in this method limits the commercialization of saleable gas nanosensors: Firstly, sensitive nanowires must be prepared before placing it on prepatterned electrodes. Thus, if some sensitive materials do not form nanowire, this method will become invalid. Secondly, connecting the nanowires to the electrodes or creating functional heterostructures and interfaces between the nanoire and the electrodes by mechanical gripping, alignment and assembly of nanowires will be a very difficult work. An AFM (atomic force microscope) has to be used in the above processes, which results in a low efficiency. Actually, there exists another fabrication approach, although discussed in an only limited number of pap

英文关键词： Nanogaps；Nanofabrication；Low dimension materials dielectrophoretic assembly；In-situ growth of nanowire；Flexible nanosensors