高功率单频电泵浦垂直外腔面发射半导体激光器研究

项目名称： 高功率单频电泵浦垂直外腔面发射半导体激光器研究

项目编号： No.61204056

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 信息四处

项目作者： 张星

作者单位： 中国科学院长春光学精密机械与物理研究所

项目金额： 28万元

中文摘要： 研究高功率单频电泵浦垂直外腔面发射半导体激光器（EP-VECSEL），满足我国光纤激光泵浦、激光成像、激光雷达、激光气体检测等应用领域中对于高输出功率、窄激光频率线宽、高光束质量的面发射半导体激光光源的迫切需求。我们提出基于相位共轭谐振腔结构实现窄激光频率线宽、高光束质量的设计方案，建立芯片结构与外部谐振腔相结合的理论模型，优化材料及谐振腔结构并研制高功率单频EP-VECSEL器件。同时为提高器件高功率单频工作的稳定性，采用反向生长、衬底去除及高导热衬底键合以实现对器件的热行为精确控制，并在外延结构中引入电流扩散层来实现均匀的注入电流分布。完善建立的理论分析模型，并优化材料生长技术及器件制备工艺，为获得自主知识产权的高功率单频EP-VECSEL器件打下理论和技术基础。

中文关键词： 垂直外腔面发射激光器；高功率；单频；相位共轭；激光线宽

英文摘要： The objective of this program is to carry out research on high-power single-frequency electrically-pumped vertical-external-cavity surface-emitting lasers (EP-VECSEL), which will be essential for the applications such as fiber laser pumping, laser imaging, LIDAR, and LASIR. We proposal a new design scheme which is based on the phase-conjugate resonant cavity to realize both narrow laser frequency linewidth and high beam quality. We will build the theoretical model for the design of the epitaxial structure combined with the external cavity. Through appropriate optimization of the structural paremeters of epitaxy and phase-conjugate cavity, EP-VECSEL devices with both high output power and single frequency operation will be developed. Also, to enhance the stability of the high-power single-frequency operation, technologies such as reverse order epitaxial growth, substrate removal, and high thermal conductive bonding will be utilized to control the devices' thermal behavior. To achieve uniform current density distribution in multi-layer structure, additional current spreading layer will be introduced to the epitaxial structure. The theoretical model which will be built in this program, combined with the optimized epitaxial growth technology and device fabrication processes, will be the theoretical and technical bas

英文关键词： vertical-external-cavity surface-emitting laser；high power；single frequency；phase-conjugation；laser linewidth