电场力驱动预制结构流变成形的气压传感器制备方法研究

项目名称： 电场力驱动预制结构流变成形的气压传感器制备方法研究

项目编号： No.51305347

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 机械、仪表工业

项目作者： 安宁丽

作者单位： 西安理工大学

项目金额： 26万元

中文摘要： 药品包装过程急需密封性在线检测，而常规传感器难以高灵敏度感知微弱泄漏气流，项目提出一种具有高灵敏度的PVDF/CNTs锥形微柱阵列气压传感器。针对直接在器件工作基底制备具有压电性能的PVDF锥形微柱阵列结构的困难，提出一套新工艺构想：通过电毛细力诱导聚合物形成预制阵列结构，然后在电场力驱动作用下聚合物流变拉伸形成垂直取向、均匀有序的锥形微柱阵列结构。研究锥形微柱阵列传感器的结构模型，确定结构参数；研究制备PVDF锥形微柱阵列结构的"成形控性"新工艺，阐明外能场及内聚能对PVDF结晶生长、取向及微结构形成的影响机理，揭示电场力驱动PVDF流变拉伸行为对材料压电性能和器件力电转化性能的影响规律；研究微结构和器件性能间的相互关系。通过上述问题的研究，为实现高灵敏度PVDF/CNTs锥形微柱阵列气压传感器的制备提供了理论依据和科学基础。

中文关键词： 聚偏氟乙烯；微结构；电场力驱动；聚合物流变；传感器

英文摘要： Satisfying the requirements of online monitoring with medicine packaging and sensing the lower airflow of leakage, a better sensitivity PVDF/CNTs cone-type pillar arrays pressure sensor is proposed. To prepare the piezoelectric PVDF cone-type pillar arrays on sensor's substrate, a process conceive is proposed that the polymer is induced into the initial arrays structure by the electro-capillary force, and then stretched into well-aligned cone type pillar arrays with high aspect ratio in the strong electric field. The concrete research contents include: the device structures model and parameter; the new micro-structuring composition process for preparing piezoelectric PVDF cone-type pillar arrays; exploration the influence of energy on the polymer crystallization orientation and micro-structure; investigation the influence of electric field-driven PVDF polymer rheological stretching on piezoelectric properties and electromechanical conversion of materials; the relation micro-structure and device performance. The results provide the theory evidence for preparation PVDF/CNTs cone-type pillar arrays pressure sensor.

英文关键词： PVDF；Micro-structure；Electric field-driven；polymer rheology；sensors