基于共格界面的超硬纳米复合膜强化机制及其普适性研究

项目名称： 基于共格界面的超硬纳米复合膜强化机制及其普适性研究

项目编号： No.51471110

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 一般工业技术

项目作者： 李伟

作者单位： 上海理工大学

项目金额： 80万元

中文摘要： 德国科学家Stan Veprek首先提出了TiSiN纳米复合膜的超硬效应来源于非晶Si3N4界面相包覆TiN纳米等轴晶粒的纳米复合结构(nc-TiN/a-Si3N4 模型)，然而由于该模型缺乏足够的实验证据，引起本领域内的诸多分歧。申请人的前期研究发现，TiSiN纳米复合膜在被强化时的Si3N4界面相呈结晶态，并与相邻的TiN纳米晶粒呈共格外延生长，据此提出TiSiN纳米复合膜的共格界面强化机制，但是该机制是否成立和具有普适性，需从实验和理论上加以论证，故本申请项目拟聚焦于以下几方面的研究：(1)选取四种有代表性的纳米复合膜体系，研究纳米复合膜的硬度和界面相结构之间的演变关系；(2)设计具有相应界面相厚度的四种纳米多层膜，利用纳米多层膜结构验证纳米复合膜的共格界面强化机制；(3)利用第一性原理和共面界面强化理论对纳米复合膜共格界面强化机制及其普适性进一步进行模拟计算和理论验证。

中文关键词： 表面改性；纳米表面工程；磁控溅射；纳米晶；纳米复合涂层

英文摘要： The German scientist, Stan Veprek, firstly proposed that the superhard effect of TiSiN nanocomposite film originates from the nc-TiN/a-Si3N4 model, in which equiaxed TiN nanocrystallites (nc-TiN) were embedded in amorphous Si3N4 (a-Si3N4) matrix. However, lack of enough experimental evidence, this model brings out many controversies. Based on our initial research results, when TiSiN nanocomposite film was strengthened, Si3N4 interfacial phase presented crystallized state and grew coherently with adjacent TiN crystallites. Accordingly, the coherent-interface based strengthening mechanism of the TiSiN nanocomposite film was proposed. However, the validity and universality of this coherent-interface strengthening mechanism need to be further investigated through experiment and theory aspects. To this end, this project focuses on the following research aspects: (1) By adopting the four representative nanocomposite films, the relations between the hardness and the interfacial phase structure of nanocomposite films are investigated; (2) By designing four corresponding nanomultilayered films with the same interfacial phase thickness, the coherent-interface strengthening mechanism of nanocomposite film is verified through nanomultilayered structure; (3) By using the first principle simulation and coherent-interface strengthening theory, the validity and universality of the coherent-interface strengthening mechanism for nanocomposite films are further verified through simulation and theoretical calculation.

英文关键词： surface modification;nano surface engineering;magnetron sputtering;nanocrystalline;nanocomposite coating