4H-SiC纳米线阵列结构精细调控及其日盲型紫外光探测性能研究

项目名称： 4H-SiC纳米线阵列结构精细调控及其日盲型紫外光探测性能研究

项目编号： No.51202115

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 无机非金属材料学科

项目作者： 尉国栋

作者单位： 宁波工程学院

项目金额： 25万元

中文摘要： 本项目拟以高性能日盲型紫外光探测器的研发为导向，优化选择4H-SiC纳米线阵列为材料体系，通过制备工艺的精细设计与调控，实现纳米线阵列的生长及其结构参数如周期、填充率、尺寸、结晶取向、空间排列等的精细控制，进而探索阵列结构对其室温和高温光探测性能的影响，最终构筑具有高灵敏、高增益、低噪声的新型日盲型紫外光探测系统。研究工作将深入揭示4H-SiC纳米线阵列结构与光探测性能间的关联，阐明其光探测特性与机理，有望通过阵列结构的精细设计与优化，获得性能优异的能在高温下稳定工作的日盲型紫外光探测器。相关工作是在大量研究积累基础上的重要延伸和拓展，项目的实施将为SiC纳米线阵列用作高温紫外光探测提供一定的基础数据和关键技术，具有显著的科学意义和潜在的应用价值。

中文关键词： 碳化硅；sic；光探测；紫外；纳米线

英文摘要： In the present work, directed by the investigation of light blind UV detector with high performance, 4H-SiC nanowire arrays are considered as the key source material systems. To meet the challenge of the fabrication of UV detector with excellent properties such as light blind, high sensitivity, high gain and low noise, the precisely controlled growth of the arrays is accomplished firstly by tailoring the processing parameters for the growth of the arrays such as the periods, fill rates, sizes, structures, and crystal orientations, space arrangements and synthesis temperatures. Subsequetly, the research work will come to disclose the correlation between the structures and properties of 4H-SiC nanarrays, and clarify their characteristics and optical detection mechanism of the UV detectors, which makes it be promising for building solar blind UV detectors with excellent performance by design and optimization of the array structures. Current work is an important extension of our previous research, and could present some basic data and key techniques for the exploration high-temperature UV detector fabricated by the source materials of 4H-SiC nanoarrays, suggesting its remarkable significance in the science and potential applications.

英文关键词： silicon carbide；sic；photodetector；UV；nanowire