微细电解钻铣削高效加工技术的基础研究

项目名称： 微细电解钻铣削高效加工技术的基础研究

项目编号： No.51305238

项目类型： 青年科学基金项目

立项/批准年度： 2014

项目学科： 机械、仪表工业

项目作者： 刘勇

作者单位： 山东大学

项目金额： 25万元

中文摘要： 本项目针对MEMS部件和医疗器械中大量微尺度金属结构的制造需求，深入分析目前微细电解加工技术存在的加工效率低、加工稳定性差等问题，结合微细电解加工原理和高速铣削的基本思想，提出微细电解钻铣削高效加工技术，以实现微尺度金属结构的高效、精密、低成本制造。课题以显著提高微细电解加工效率为目标，重点研究微小加工间隙内漩涡流对物质传递的影响规律、多场耦合对加工过程的作用机制等基础理论问题；突破高回转精度微电极的高效制备、微小加工间隙内电场和流场的动态优化、高转速微电极微细电解高效加工工艺研究等关键技术问题，构建微细电解钻铣削高效加工理论与技术体系，为实现金属微结构的高效、精密制造提供基础技术支撑。

中文关键词： 微细电解铣削加工；微细电解钻削加工；高转速；高回转精度；微电极

英文摘要： In-depth analysis of key prolems in current electrochemical micromachining technology, such as, low efficiency and poor processing stability, an effective new method is proposed to solve the fabrication problem of numerous metal microstructures in MEMS components and medical devices. The purpose of the new method, which is named the technology of electrochemical micro drilling and milling with high efficiency due to the combination of electrochemical micromachining with ultra short voltage pulses and high-speed milling technology, is to implement the fabrication of metal microstructures with high efficiency, high precision and low cost. Many important basic theoritical pionts, such as the positive effect of micro eddy current on the by-product transportation in the micro sidegap and the multi-field coupling effects on the whole machining process will be deeply studied. Many key techniques, such as the efficient method for fabricating micro electrode with high rotating precision, dynamic optimization of the electric field and the flow field in the micro-machining gap and the technical study of electrochemical micromachining with high efficiency using high-speed micro electride will be overcomed. Afer that, the theoretical and technical system of the technology will be developed to provide basic techn

英文关键词： electrochemical micro milling；electrochemical micro drilling；high-speed；high rotation precision；micro electrode