AMOLED用氧化锌基TFT及像素单元驱动电路制备研究

项目名称： AMOLED用氧化锌基TFT及像素单元驱动电路制备研究

项目编号： No.61275025

项目类型： 面上项目

立项/批准年度： 2013

项目学科： 无线电电子学、电信技术

项目作者： 王漪

作者单位： 北京大学

项目金额： 82万元

中文摘要： AMOLED显示屏具有结构简单、高亮度和对比度、响应速度快、色彩逼真、宽视角、功耗低、工作温度宽、环保等优异性能，另外还具有可实现柔软显示等特点，将会替代LCD成为新一代显示技术。为了推动AMOLED 显示技术的应用和发展，本项目旨在研究以ZnO基薄膜晶体管（TFT）为基础，制备出具有高载流子迁移率的ZnO基TFT和用于AMOLED显示的ZnO基像素单元驱动电路以及测试用显示屏。具体研究内容包括：采用先进的集成电路制造工艺，制备出可用于TFT的ZnO基金属氧化物半导体薄膜、高k栅介质及源漏电极材料、双栅ZnO基TFT器件；研发AMOLED像素单元驱动电路。同时对ZnO基薄膜材料、TFT绝缘栅介质的导电机理、制备工艺以及器件的可靠性等进行系统研究。研究成果具有广阔的应用前景和极高的应用价值。

中文关键词： 有源矩阵有机发光二极管；薄膜晶体管；氧化锌基半导体；像素驱动电路；

英文摘要： AMOLED display which is likely to replace LCD to become a new generation of display technology such as a simple structure, ultra-thin, high brightness, short response time, color fidelity, wide angle, energy-saving, wide working temperature range, environmental protection as well as flexible bending. In this project order to promote the application and development of AMOLED display technologies, we proposed to base on ZnO-based thin-film transistor (TFT). And we'll study and fabrication of ZnO-based TFT with high carrier mobility, pixel driving circuit and test with the display for AMOLED display panel. To prepare fabrication of ZnO-based metal oxides thin film samples, high-k gate dielectric, source and drain electrodes materials, dual-gate ZnO-based TFT devices and pixel driving circuit will be applied in advanced integrated circuit manufacturing technology. At the same time, we also investigate conductive mechanism of ZnO-based thin film and TFT gate dielectric materials, TFT preparation process technology and so on. This research has broad application prospects and high value.

英文关键词： AMOLED；Thin Film Transistor；ZnO-based Semicondutor；Pixel Driving Circuits；