面向大气环境中超低浓度VOCs检测的高性能半导体氧化物传感器的研究

项目名称： 面向大气环境中超低浓度VOCs检测的高性能半导体氧化物传感器的研究

项目编号： No.61503148

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 自动化技术、计算机技术

项目作者： 孙鹏

作者单位： 吉林大学

项目金额： 22万元

中文摘要： 针对超低浓度大气污染物VOCs的准确检测，研制出高灵敏、高选择和高抗湿的半导体氧化物气体传感器具有重要的科学意义。本项目融合半导体氧化物分等级纳米结构赋予的“材料结构增感”、纳米掺杂和表面修饰技术的“改性增感”和微纳插指电极的“电极结构增感”三级增感策略，增强半导体氧化物的识别功能、转换功能以及敏感体利用效率，进而提升传感器对VOCs气体的灵敏度和选择性；通过掺入吸湿性杂质、表面修饰疏水基团或无机组分和紫外光辅助照射除湿的三级抗湿策略，提升半导体氧化物的耐湿性，实现传感器在高湿环境下对VOCs的准确检测；在不同湿度下，研究H2O、O2和VOCs在半导体氧化物表面上的吸附行为以及对传感特性的影响，明晰高湿环境下的传感机理，为提高抗湿性提供理论支撑。本项目的实施不仅有助于构筑面向大气污染物VOCs检测的实用化传感器，也能为改善半导体氧化物传感器性能提供新的解决方案。

中文关键词： 气体传感器；大气环境监测；挥发性有机化合物；半导体氧化物；分等级纳米结构

英文摘要： Aimed at the detection of volatile organic compounds (VOCs) in atmospheric environment, development of the gas sensors based on semiconductor oxides with high sensitivity, high selectivity, and high anti-humidity has important scientific significance. The project will integrate semiconductor oxides with hierarchical nanostructures, the technologies of doping and surface modification, and micro-nano electrode, in order to improve the recognition function, transformation function, and utilization efficiency of oxides, thereby enhancing the sensitivity and selectivity of sensor to VOCs; The anti-humidity of semiconductor oxides will be enhanced by the doping of hygroscopic impurities, the surface modification of hydrophobic groups or inorganic component, and ultraviolet light irradiation, which realizes the detection of VOCs in high humidity environment; To provide data for confirming the sensing mechanism in high humidity atmosphere, the surface adsorption behavior and influence on the sensing properties of H2O, O2, and VOCs will be investigated under different humidity. The implementation of this project will not only help to construct practical sensor for detection of VOCs, but also provide new solutions for improvement performance of sensor based on semiconductor oxides.

英文关键词： gas sensor;atmospheric environmental monitoring;volatile organic compound;semiconductor oxide;hierarchical nanostructure