石墨烯纳机电谐振器制备方法及其非线性动态特性的基础研究

项目名称： 石墨烯纳机电谐振器制备方法及其非线性动态特性的基础研究

项目编号： No.51205302

项目类型： 青年科学基金项目

立项/批准年度： 2013

项目学科： 机械工程学科

项目作者： 王卫东

作者单位： 西安电子科技大学

项目金额： 25万元

中文摘要： 石墨烯作为一种新的碳元素结构形态，表现出来的一系列奇特的电子和物理特性，在微纳机电器件、固态气敏传感器和集成电路等诸多领域有着重要的应用前景。本项目拟开展的纳机电谐振器制备方法及非线性动态特性研究，研究对象为基于石墨烯的纳机电谐振器，采用化学气相淀积方法制备纳机电谐振器，并针对其进行力电耦合特性和非线性谐振特性的理论研究、分子动力学仿真和实验研究。重点研究石墨烯谐振器的集中参数模型建立和特征参数的提取，及其机电参数的分析和设计。研究内容包括：1）石墨烯纳机电谐振器的制备方法；2）多因素影响下的石墨烯谐振梁的力电耦合特性和非线性动态特性研究；3）基于分子动力学方法的阻尼机制和谐振特性研究。本项目提出了研究石墨烯纳机电谐振器的新技术思路，通过本项目的研究可以获得更完善的石墨烯谐振器制作工艺，揭示石墨烯谐振器的非线性动态特性，进而为石墨烯谐振器的设计和制备打下良好的基础。

中文关键词： 石墨烯；力学性能；纳机电谐振器；制备技术；谐振特性

英文摘要： As a new carbon structure and morphology, graphene shows a series of unique electronic and physical properties, and the applications of graphene has played a significant role in the fields of micro/nanoelectromechanical devices, solid-state gas sensors and integrated circuits, etc. In this project, the research on the preparation method of NEMS resonators and its nonlinear dynamic characteristics is carried out based on graphene material. The chemical vapor deposition method is used to prepare the graphene resonator. The theoretical research, molecular dynamics simulations and experimental studies are performed in the aspect of its electromechanical coupling characteristics and nonlinear dynamic characteristics. The focus of this research lies not only in the establishment of the lumped parameter model for the graphene resonator as well as the extraction of the feature parameters, but also in the design and analysis of the electromechanical parameters. The study includes: 1) Preparation method of the graphene resonators; 2) Electromechanical coupling characteristics of graphene beam and its nonlinear dynamic characteristics under the influence of multi factors; 3) The damping mechanism and resonance characteristics based on molecular dynamics method. A new technical idea for the research on graphene resonators i

英文关键词： graphene；mechanical properties；nanoelectromechanical resonator；preparation technique；resonance chracteristics