DMD数字光刻新型光学引擎耦合及其外腔反馈合束研究

项目名称： DMD数字光刻新型光学引擎耦合及其外腔反馈合束研究

项目编号： No.61475037

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 周金运

作者单位： 广东工业大学

项目金额： 82万元

中文摘要： 随着无掩模数字光刻在工业应用中的蓬勃兴起，DMD微镜阵列因衍射而使成像质量降低、二进制开关因不稳而使曝光难以均匀和足量就成为迫切需要解决的关键问题。目前已报道的方法尚缺乏实效，我们提出建立新型光学引擎、通过外腔光学反馈的耦合和合束，旨在从本质上解决其衍射成像和均匀足量曝光的科学技术问题。预实验的初步成效表明：利用LD耦合光纤的增益特性，使其尾端光隔离器与投影光学系统中的输出耦合镜之间形成耦合和合束，方法上具有创新性；根据外腔反馈机制、物像共轭关系和部分相干光叠加原理等建立耦合和合束成像理论，有一定的理论创新性。使照明系统与DMD和投影透镜系统等互关联融合，解决新型光学引擎最优光学设计和结构配置等问题；建立耦合和合束正反馈的动力学协同作用，探索其动力学机理和光学成像理论，解决提高数字光刻系统光学成像质量和均匀足量曝光的难点，对深化数字动态光刻理论、发展下一代光刻技术有现实和深远的意义。

中文关键词： 微纳光学；光刻；数字微镜器件（DMD）；光学引擎；耦合与合束

英文摘要： With maskless digital lithography surging forward in industrial applications, DMD micromirror array due to diffraction resulting in the imaging quality reduction, binary on/off due to instability resulting in uneven and inadequate exposure will become urgent needs to solve the key problems. Methods having been reported at present still lack practical efficiency. We put forward to set up the novel optical engine, and establish the coupling and beam-combining in external cavity feedback. This is designed to solve in essence the problem of diffraction imaging as well as uniform and enough exposure. Preliminary experimental results show that，with the aid of LD coupling fiber gain characteristics as well as the coupling and beam-combining between the fiber end's optical isolator and the output coupler, the method is innovative; According to the external cavity feedback mechanism, the objective and image conjugate relations, partially coherent light superposition principle, etc to establish the coupling and beam-combining imaging theory, its theory have certain innovation. In order to cross-correlate and integrate the illumination system, DMD and projection lens system, it is necessary for solving optimal optical design and structure configuration and so on in the novel optical engine; Through establishing the dynamics and cooperativity effect of coupling and beam-combining in positive feedback, exploring its dynamic mechanism and the optical imaging theory, and solving the difficulties about digital lithography imaging quality and uniform and dose-enough exposure, it has realistic and far-reaching significance to deepen the digital dynamic lithography theory and develop the next generation lithography technology.

英文关键词： Micro-nano optics;Lithography;Digital micromirror device (DMD);Optical engine;Coupling and beam combining